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Electrically tunable GHz acoustic waveguide using Al
0.7
Sc
0.3
N thin film
期刊论文
APPLIED PHYSICS LETTERS, 2025, 卷号: 126, 期号: 9
作者:
Li, Jiawei
;
Xu, Xuankai
;
Li, Yang
;
Wu, Tao
Adobe PDF(3005Kb)
|
收藏
|
浏览/下载：62/3
|
提交时间：2025/03/25
Chirp modulation
Phase shift
Scandium compounds
Surface discharges
Acoustic waveguides
Acoustics waves
Aluminium-scandium
Dynamic modulation
Electrically tunable
Nitride thin films
Simulation approach
Thin-films
Vertical electric fields
Waveguide widths
Silicon-integrated scandium-doped aluminum nitride electro-optic modulator
期刊论文
PHOTONICS RESEARCH, 2025, 卷号: 13, 期号: 2, 页码: 477-487
作者:
Xu, Tianqi
;
Liu, Yushuai
;
Pu, Yuanmao
;
Yang, Yongxiang
;
Zhong, Qize
Adobe PDF(1147Kb)
|
收藏
|
浏览/下载：397/6
|
提交时间：2024/06/24
Aluminum gallium nitride - Amplitude shift keying - CMOS integrated circuits - Digital filters - Electrooptical devices - Fiber optic sensors - Frequency shift keying - Indium phosphide - Light modulation - Light modulators - Notch filters - Phase shift keying - Photonic integrated circuits - Photonic integration technology - Ring lasers - Scandium compounds - Semiconducting aluminum compounds - Semiconducting indium phosphide - Signal modulation - Silicon nitride
Electro-optic modulators - Electro-optics - Fabrication and characterizations - Functional devices - Hexagonal wurtzite structure - Nonlinear properties - Photonic circuits - Piezoelectric property - Seamless integration - Second orders
Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2025, 卷号: PP, 期号: 99
作者:
Yang Li
;
Jiawei Li
;
Tao Wu
Adobe PDF(5299Kb)
|
收藏
|
浏览/下载：71/2
|
提交时间：2025/03/03
Acoustic delay lines - Guided electromagnetic wave propagation - Indium phosphide - Linear actuators - Nitrides - Piezoelectric transducers - Scandium - Scandium compounds - Ultrasonic transducers - Ultrasonic waves
Electrode layout - Element method - Phase relationships - Propagation loss - Reflected waves - Scandium doped aluminum nitride - Single-phase unidirectional transducers - Symmetrics - Theoretical modeling - Unit cells
Demonstration of acousto-optical modulation based on a thin-film AlScN photonic platform
期刊论文
PHOTONICS RESEARCH, 2024, 卷号: 12, 期号: 6, 页码: 1138-1149
作者:
Bian, Kewei
;
Li, Zhenyu
;
Liu, Yushuai
;
Xu, Sumei
;
Zhao, Xingyan
Adobe PDF(2215Kb)
|
收藏
|
浏览/下载：352/4
|
提交时间：2024/06/21
Acoustic waves
Aluminum nitride
CMOS integrated circuits
Light modulation
MOS devices
Optical signal processing
Oxide semiconductors
Scandium
Scandium compounds
Thick films
Thin film circuits
Acousto-optic modulations
Acousto-optic modulator
Complementary metal-oxide-semiconductor technologies
Fabrication process
Microwave signal processing
Modulation technologies
On chips
Optical signal-processing
Piezoelectric property
Thin-films
Microwave-induced thermoacoustic imaging with a multi-cell AlScN piezoelectric micromachined ultrasonic transducer
期刊论文
APPLIED PHYSICS LETTERS, 2023, 卷号: 122, 期号: 13
作者:
Wang, Yiwei
;
Zhang, Lejia
;
Wang, Baosheng
;
Cai, Junxiang
;
Gu, Yuandong Alex
Adobe PDF(2264Kb)
|
收藏
|
浏览/下载：481/4
|
提交时间：2023/04/21
Aluminum compounds
Diagnosis
III-V semiconductors
Piezoelectric transducers
Piezoelectricity
Thermoacoustics
Ultrasonic applications
Ultrasonic transducers
Aluminium-scandium
Biological information
Clinical diagnosis
Micro-machined ultrasonic transducer
Microwave pulse
Microwave-induced
Multicell
Piezoelectric
Thermoacoustic imaging
Thermoacoustic signals
Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·qm) over 146
期刊论文
APPLIED PHYSICS LETTERS, 2022, 卷号: 120, 期号: 17
作者:
Luo, Zhifang
;
Shao, Shuai
;
Liu, Kangfu
;
Lu, Yuan
;
Mazzalai, Andrea
Adobe PDF(2299Kb)
|
收藏
|
浏览/下载：467/1
|
提交时间：2022/05/20
Aluminum nitride
Electromechanical coupling
Etching
III-V semiconductors
Scandium
Scandium compounds
Semiconductor doping
Surface waves
Transducers
Alloy target
Anchor loss
Etching profile
Finite element analyse
High quality
Lamb wave resonators
Magnetron-sputtering
Perfect matched layers
Thin-films
Vertical etching
Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication
期刊论文
MICROELECTRONIC ENGINEERING, 2021, 卷号: 242
作者:
Luo, Zhifang
;
Shao, Shuai
;
Wu, Tao
Adobe PDF(3189Kb)
|
收藏
|
浏览/下载：457/0
|
提交时间：2021/06/04
ICP etching
Etching model
AlN
AlScN
Micro
Nano fabrication
Piezoelectric resonators
Aluminum nitride
Etching
Fabrication
III
V semiconductors
Inductively coupled plasma
Nitrides
Photoresists
Piezoelectricity
Resonators
Scandium compounds
Surface waves
AlN thin films
Aluminum nitride (AlN)
Contour
mode resonators
Lamb wave resonators
Micro /nano fabrications
Photoresist mask
Piezoelectric thin films
Quality factors
Optimization of AlN and AlScN Film ICP Etching
会议论文
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), ELECTR NETWORK, JAN 25-29, 2021
作者:
Zhifang Luo
;
Shuai Shao
;
Tao Wu
Adobe PDF(1221Kb)
|
收藏
|
浏览/下载：477/1
|
提交时间：2021/07/23
Aluminum nitride
Etching
III
V semiconductors
Inductively coupled plasma
Mechanics
MEMS
Nitrides
Piezoelectricity
Resonators
Scandium compounds
Surface waves
Thin films
AlN films
Aluminum nitride (AlN)
Contour
mode resonators
Etching rate
ICP etching
Lamb wave resonators
Piezoelectric thin films
Quality factors
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