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Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers
2025
发表期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (IF:2.5[JCR-2023],2.6[5-Year])
ISSN1941-0158
EISSN1941-0158
卷号PP期号:99
发表状态已发表
DOI10.1109/JMEMS.2025.3528522
摘要

This work presents a comprehensive band analysis for calculating the S21 and bandwidth (BW) of acoustic delay lines (ADLs) based on single-phase unidirectional transducers (SPUDTs). Focusing on the electrode layout, the amplitude and phase relationships of the incident fundamental symmetric (S0) Lamb wave and reflected waves at electrode centers (ECs) of Double SPUDT and Bottom Floating (BF) SPUDT unit cells across different frequencies are first investigated. Subsequently, ADLs are conceptualized as a model consisting of unit cells with transduction centers (TCs) and reflection centers (RCs) on each port, with an intermediate gap that introduces propagation loss (PL). Utilizing 1-μm-thick aluminum nitride (AlN) and scandium-doped aluminum nitride (Al0.7Sc0.3N) thin films, theoretical modeling and finite element method (FEM) assisted calculations are conducted to compute the reflection (Γ) and transmission (T) coefficients for both Double SPUDT and BF SPUDT unit cells. The S21 and 5-dB BW in the center frequency (fc) vicinity of the ADLs, with cell count (N) ranging from 3 to 13 and gap length (Lg) ranging from 50 to 300 μm, are theoretically computed. The comparison with time-gated measurements demonstrates that the calculation errors are consistently below 5 dB⋅MHz. This analysis provides theoretical insight into the relationships among the ADL’s spectrum, PL, N, SPUDT structure, and piezoelectric film, offering valuable guidance for ADL performance optimization. 2024-0197

关键词Acoustic delay lines - Guided electromagnetic wave propagation - Indium phosphide - Linear actuators - Nitrides - Piezoelectric transducers - Scandium - Scandium compounds - Ultrasonic transducers - Ultrasonic waves Electrode layout - Element method - Phase relationships - Propagation loss - Reflected waves - Scandium doped aluminum nitride - Single-phase unidirectional transducers - Symmetrics - Theoretical modeling - Unit cells
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收录类别EI
语种英语
出版者Institute of Electrical and Electronics Engineers Inc.
EI入藏号20251017981441
EI主题词Aluminum nitride
EI分类号202.9.3 Others, including Bismuth, Boron, Cadmium, Cobalt, Mercury, Niobium, Selenium, Silicon, Tellurium and Zirconium - 711.2 Electromagnetic Waves in Relation to Various Structures - 732.1 Control Equipment - 752.1 Acoustic Devices - 753.1 Ultrasonic Waves - 753.2 Ultrasonic Devices - 804.2 Inorganic Compounds
原始文献类型Article in Press
来源库IEEE
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文献类型期刊论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/493497
专题信息科学与技术学院
信息科学与技术学院_PI研究组_吴涛组
信息科学与技术学院_硕士生
信息科学与技术学院_博士生
作者单位
1.School of Information Science and Technology, ShanghaiTech University, Shanghai, China
2.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
3.School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China
4.Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, Shanghai, China
第一作者单位信息科学与技术学院
第一作者的第一单位信息科学与技术学院
推荐引用方式
GB/T 7714
Yang Li,Jiawei Li,Tao Wu. Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2025,PP(99).
APA Yang Li,Jiawei Li,&Tao Wu.(2025).Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,PP(99).
MLA Yang Li,et al."Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS PP.99(2025).
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