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Progress on ultrafast laser lithography of large-scale lithium niobate integrated photonics
期刊论文
KEXUE TONGBAO/CHINESE SCIENCE BULLETIN, 2024, 卷号: 69, 期号: 12, 页码: 1528-1539
作者:
Huang, Jinxin
;
Chen, Jinming
;
Liu, Zhaoxiang
;
Song, Lvbin
;
Wang, Guanhua
Adobe PDF(6394Kb)
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浏览/下载:349/0
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提交时间:2024/05/11
Delay circuits
Efficiency
Etching
Fabrication
Femtosecond lasers
Lithium
Micromachining
Niobium compounds
Optical waveguides
Photonic devices
Photonic integration technology
Photoresists
Refractive index
Resonators
Thin film circuits
Timing circuits
Femtosecond laser micromachining
High quality
High Speed
Large-scales
Laser lithography
Lithium niobate
Photonics Integrated Circuits
Propagation loss
Thin film lithium niobate
Thin-films
Three-dimensional dynamic optical trapping using non-iterative computer-generated holography
期刊论文
OPTICS AND LASERS IN ENGINEERING, 2023, 卷号: 164
作者:
Sun, Fengyu
;
Zhu, Linwei
;
Wang, Wenpeng
;
Shi, Zhiyong
;
Liu, Yanqi
Adobe PDF(2372Kb)
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浏览/下载:534/0
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提交时间:2023/03/10
Computer generated holography
Micromachining
Computer-generated holography
Continuous dynamics
High uniformity
Iterative algorithm
Multifocal
Non-iterative
Non-iterative algorithms
Optical trappings
Particle manipulation
Three-dimensional dynamics
Real-Time Acoustic Holography With Physics-Based Deep Learning for Robotic Manipulation
期刊论文
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2023, 卷号: PP, 期号: 99, 页码: 1-10
作者:
Chengxi Zhong
;
Jiaqi Li
;
Zhenhuan Sun
;
Teng Li
;
Yao Guo
Adobe PDF(2493Kb)
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浏览/下载:307/2
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提交时间:2023/08/11
3D printing
Acoustic fields
Deep learning
Dynamics
Holograms
Intelligent robots
Interactive computer systems
Inverse kinematics
Inverse problems
Lithography
Micromachining
Micromanipulators
Motion planning
Real time systems
Three dimensional displays
Transducers
Acoustic holography
Deep learning
Non-contact
Phased array of transducer
Phased-arrays
Physics-based
Real
Time system
Real- time
Robotic manipulation
Three-dimensional display
A Terahertz Corrugated Horn Array Based on Silicon Platelets
会议论文
2022 47TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ), Delft, Netherlands, 28 Aug.-2 Sept. 2022
作者:
Li, Sheng
;
Yang, Jinping
;
Zhu, Zhongbo
;
Yang, Shicheng
;
Wang, Caixia
Adobe PDF(323Kb)
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浏览/下载:306/0
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提交时间:2022/11/04
Metals
Receivers
Micromachining
Bandwidth
Gain measurement
Silicon
Loss measurement
Automated synthesis of gadopentetate dimeglumine through solid-liquid reaction in femtosecond laser fabricated microfluidic chips
期刊论文
CHINESE CHEMICAL LETTERS, 2022, 卷号: 33, 期号: 2
作者:
Yin, Difeng
;
Li, Yucen
;
Xia, Lingling
;
Li, Wenbo
;
Chu, Wei
Adobe PDF(990Kb)
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浏览/下载:585/0
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提交时间:2022/03/23
Automated synthesis
Femtosecond laser micromachining
Microfluidics
MRI imaging
UV-vis absorption spectrum
An Aluminum-Nitride PMUT with Pre-Concaved Membrane for Large Deformation and High Quality-Factor Performance
会议论文
21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2021, Virtual, Online, United states, June 20, 2021 - June 25, 2021
作者:
Sheng Wu
;
Wei Li
;
Ding Jiao
;
Heng Yang
;
Tao Wu
Adobe PDF(887Kb)
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浏览/下载:440/1
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提交时间:2021/12/03
Actuators
Aluminum nitride
III
V semiconductors
Membranes
Microsystems
Nitrogen compounds
Piezoelectricity
Surface micromachining
Ultrasonic applications
Ultrasonic transducers
Device performance
High quality factors
High resonance frequency
Medical ultrasonics
Micro
machined ultrasonic transducer
Molybdenum electrodes
Piezoelectric membranes
Surface micromachining process
PMUT
surface micromachining process
sealed cavity
non-flat membrane structure
high Q factor
large displacement
Size-controlled flow synthesis of metal-organic frameworks crystals monitored by in-situ ultraviolet-visible absorption spectroscopy
期刊论文
CHINESE CHEMICAL LETTERS, 2021, 卷号: 32, 期号: 3, 页码: 1131-1134
作者:
Li, Wenbo
;
Li, Yucen
;
Zhang, Wei
;
Yin, Difeng
;
Cheng, Ya
Adobe PDF(746Kb)
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浏览/下载:251/4
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提交时间:2021/05/28
Nanoporous particles
Microfluidics
Flow synthesis
Metal-organic frameworks
UV-vis absorption spectrum
Femtosecond laser micromachining
A three-dimensional microfluidic mixer of a homogeneous mixing efficiency fabricated by ultrafast laser internal processing of glass
期刊论文
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2020, 卷号: 126, 期号: 10
作者:
Li, Wenbo
;
Chu, Wei
;
Yin, Difeng
;
Liang, Youting
;
Wang, Peng
Adobe PDF(1119Kb)
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浏览/下载:288/3
|
提交时间:2020/11/02
Ultrafast laser micromachining
Selective chemical etching
Microfluidics
Micromixer
A resonant cantilever based particle sensor with particle-size selection function
期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 卷号: 28, 期号: 8
作者:
Bao, Yuyang
;
Cai, Shengran
;
Yu, Haitao
;
Xu, Tiegang
;
Xu, Pengcheng
Adobe PDF(5398Kb)
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收藏
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浏览/下载:556/1
|
提交时间:2018/06/13
particle sensor
single-sided micromachining process
particle-size filter and selection
flow micro-channel
integrated resonant cantilever
Metal surface structuring with spatiotemporally focused femtosecond laser pulses
期刊论文
JOURNAL OF OPTICS, 2018, 卷号: 20, 期号: 1
作者:
Tan, Yuanxin
;
Chu, Wei
;
Lin, Jintian
;
Fang, Zhiwei
;
Liao, Yang
Adobe PDF(2995Kb)
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收藏
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浏览/下载:789/2
|
提交时间:2018/03/01
spatiotemporal focusing
femtosecond laser micromachining
surface structuring
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