A resonant cantilever based particle sensor with particle-size selection function

doi:10.1088/1361-6439/aabdac

	A resonant cantilever based particle sensor with particle-size selection function
	Bao, Yuyang1,2,3 ; Cai, Shengran 1,3; Yu, Haitao 1,3; Xu, Tiegang 1,3; Xu, Pengcheng 1,3; Li, Xinxin1,2,3
	2018-08
发表期刊	JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IF:2.4[JCR-2023],2.0[5-Year])
ISSN	0960-1317
卷号	28 期号:8
发表状态	已发表
DOI	10.1088/1361-6439/aabdac
摘要	This paper reports on a novel resonant-gravimetric micro-cantilever based particle sensor for detecting particles (e.g. PM2.5) in air. A row of micro-pillars with desired separation-distance are integrated in a micro-channel that is embedded in the cantilever as a filter to select the particles of desired size. When particles containing air are pumped into the micro-channel, the particles with desired diameters are trapped by the micro-pillars near the free-end of the cantilever, which results in a detectable resonant frequency shift of the micro-cantilever. After detection the sensor can be recovered by reversing the direction of the air flow to blow off the trapped particles and the sensor is ready for the next detection. By tuning the spacing between the barrier bars, the diameters of the trapped particles can be customized for specific detection applications. The complicated structure of the resonant sensor is fabricated by using a novel IC-foundry compatible single-sided surface micromachining technique, with singleside-polished (1 1 1) silicon wafers on a low-cost non-SOI substrate. The sensor prototype has experimentally exhibited excellent real-time detection performance to standard polystyrene micro-spheres, with the resolution of the single particle being distinguishable. The sensor is promising in applications of air pollution monitoring and analysis.
关键词	particle sensor single-sided micromachining process particle-size filter and selection flow micro-channel integrated resonant cantilever
收录类别	SCI ; SCIE ; EI
语种	英语
资助项目	Youth Innovation Promotion Association CAS[2017278]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000432432100001
出版者	IOP PUBLISHING LTD
EI入藏号	20182305290195
EI主题词	Composite micromechanics ; Ion beams ; Natural frequencies ; Particle size ; Silicon wafers ; Surface micromachining
EI分类号	Semiconductor Devices and Integrated Circuits:714.2 ; Nanotechnology:761 ; Mechanics:931.1 ; High Energy Physics:932.1 ; Solid State Physics:933
WOS关键词	CRYSTALLINE-SILICON ; MASS CONCENTRATION ; NANOPARTICLES ; EXPOSURE ; CHIP
原始文献类型	Article
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/20865
专题	信息科学与技术学院信息科学与技术学院_特聘教授组_李昕欣组信息科学与技术学院_博士生
通讯作者	Li, Xinxin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China 2.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China 3.Univ Chinese Acad Sci, Huairou 101408, Peoples R China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Bao, Yuyang,Cai, Shengran,Yu, Haitao,et al. A resonant cantilever based particle sensor with particle-size selection function[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,28(8).
APA	Bao, Yuyang,Cai, Shengran,Yu, Haitao,Xu, Tiegang,Xu, Pengcheng,&Li, Xinxin.(2018).A resonant cantilever based particle sensor with particle-size selection function.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,28(8).
MLA	Bao, Yuyang,et al."A resonant cantilever based particle sensor with particle-size selection function".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 28.8(2018).