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A Terahertz Corrugated Horn Array Based on Silicon Platelets | |
2022-08-22 | |
会议录名称 | 2022 47TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ)
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ISSN | 2162-2027 |
发表状态 | 已发表 |
DOI | 10.1109/IRMMW-THz50927.2022.9895852 |
摘要 | A terahertz corrugated horn array is widely used in array receiver systems and is suitable to be made by stacked metal sheets. In this paper, we introduce the development of a broadband 2 × 2 terahertz corrugated horn array fabricated by silicon micromachining technology. The horn array is made up of 16 metalized silicon platelets with a total weight of only 4.2 grams. The measured gain of each horn element is around 16 dBi at 240 GHz with a low cross-polarization level, and the bandwidth is greater than 100 GHz with a return loss better than -15 dB. |
关键词 | Metals Receivers Micromachining Bandwidth Gain measurement Silicon Loss measurement |
会议地点 | Delft, Netherlands |
会议日期 | 28 Aug.-2 Sept. 2022 |
URL | 查看原文 |
收录类别 | EI |
语种 | 英语 |
来源库 | IEEE |
文献类型 | 会议论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/241112 |
专题 | 大科学中心 物质科学与技术学院 大科学中心_公共科研平台_大科学装置建设部 |
通讯作者 | Li, Sheng |
作者单位 | 1.National Key Laboratory of Science and Technology on Space Microwave, Cast, Xi'an; 710100, China; 2.ShanghaiTech University, School of Physical Science and Technology, Shanghai; 201210, China; 3.Beijing Institute of Technology, School of Integrated Circuits and Electronics, Beijing; 100081, China |
推荐引用方式 GB/T 7714 | Li, Sheng,Yang, Jinping,Zhu, Zhongbo,et al. A Terahertz Corrugated Horn Array Based on Silicon Platelets[C],2022. |
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