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The study and optimization of ICP deep etching at a low-temperature for InP solid-immersion metalens fabrication 期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2023, 卷号: 166
作者:  Zhu, Yicheng;  Wang, Wenjuan;  Zhou, Min;  Qu, Huidan;  Li, Guanhai
Adobe PDF(6984Kb)  |  收藏  |  浏览/下载：482/1  |  提交时间：2023/07/28
300 mm integration of a scalable phase change material spacer by inductively coupled plasma etching 期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2023, 卷号: 164
作者:  Fang, Wencheng;  Zheng, Jia;  Zhang, Jiarui;  Li, Chengxing;  Wang, Ruobing
Adobe PDF(9718Kb)  |  收藏  |  浏览/下载：327/1  |  提交时间：2023/07/07
Precision fabrication of diamond micro-optic elements with hybrid SiO2/Cr etching masks 期刊论文
MICROELECTRONIC ENGINEERING, 2022, 卷号: 262
作者:  Yang, Zhiqi;  Zhu, Ruixue;  Zhang, Kaiyu
Adobe PDF(1268Kb)  |  收藏  |  浏览/下载：134/0  |  提交时间：2022/05/26
Lamb Wave Resonators based on Co-sputtered Al0.78Sc0.22N Thin Film 会议论文
IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, IUS, Virtual, Online, China, September 11, 2011 - September 16, 2011
作者:  Luo, Zhifang;  Shao, Shuai;  Wu, Tao
Adobe PDF(1170Kb)  |  收藏  |  浏览/下载：390/2  |  提交时间：2022/07/01
Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication 期刊论文
MICROELECTRONIC ENGINEERING, 2021, 卷号: 242
作者:  Luo, Zhifang;  Shao, Shuai;  Wu, Tao
Adobe PDF(3189Kb)  |  收藏  |  浏览/下载：461/0  |  提交时间：2021/06/04
Optimization of AlN and AlScN Film ICP Etching 会议论文
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), ELECTR NETWORK, JAN 25-29, 2021
作者:  Zhifang Luo;  Shuai Shao
Adobe PDF(1221Kb)  |  收藏  |  浏览/下载：481/1  |  提交时间：2021/07/23
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