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Spurious-Free Shear Horizontal Surface Acoustic Wave Filters Based on 36Y-Cut LiNbO3/SiO2/Si Substrates
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2025, 卷号: PP, 期号: 99, 页码: 1961-1968
作者:
Yushuai Liu
;
Yiwei Wang
;
Xuankai Xu
;
Tao Wu
Adobe PDF(3837Kb)
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收藏
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浏览/下载:39/1
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提交时间:2025/03/25
Acoustic dispersion
Acoustic resonators
Acoustic wave transmission
Acoustic waves
Bandpass filters
Electric losses
Hydrogels
Organoclay
Sawing
Sols
Ultrasonic transducers
Energy
LiNbO 3
Lithium niobate
Shear horizontal
Shear horizontal surface acoustic wave
Shear horizontals
Spurious-free
Surface acoustic wave
Surface acoustic waves
Surface-acoustic-wave filters
Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method
期刊论文
MICROMACHINES, 2023, 卷号: 14, 期号: 1
作者:
Luo, Ping
;
Zou, Yali
;
Yang, Xinyu
;
Li, Juntao
;
Huang, Xuan
Adobe PDF(4189Kb)
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浏览/下载:1417/612
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提交时间:2023/03/10
Acoustic surface wave filters
Acoustic waves
Lithium compounds
Resonators
Tantalum compounds
Correction method
Design Patterns
Optical proximity effect
Optical proximity effect correction
Optical proximity effect corrections
Optical proximity effects
Performance
Photoresistance
Surface acoustic wave resonators
Surface-acoustic-wave filters
Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate
会议论文
IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES, Tokyo, Japan, January 9, 2022 - January 13, 2022
作者:
Wu, Jinbo
;
Zhang, Shibin
;
Zhou, Hongyan
;
Zhang, Liping
;
Zheng, Pengcheng
Adobe PDF(3105Kb)
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浏览/下载:460/1
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提交时间:2022/04/08
Acoustic resonators
Acoustic surface wave filters
Bandwidth
Electromechanical coupling
Integration
MEMS
Monolithic integrated circuits
Substrates
Surface waves
Acoustic filters
Effective electro-mechanical coupling coefficients
Heterogeneous substrates
Hybrid acoustic device
Lamb wave devices
Linbo3-on-silicon
Monolithic integration
Rayleigh mode
Silicon substrates
Surface acoustic wave resonators
Low-Loss SAW Devices with LiTaO3on Extremely High Resistance Substrate
会议论文
IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, IUS, Virtual, Online, China, September 11, 2011 - September 16, 2011
作者:
Wu, Jinbo
;
Zhang, Shibin
;
Zhou, Hongyan
;
Zhang, Liping
;
Zheng, Pengcheng
Adobe PDF(1323Kb)
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收藏
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浏览/下载:403/1
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提交时间:2022/07/01
Acoustic surface wave filters
Bandwidth
Lithium compounds
Resonators
Tantalum compounds
Acoustic filters
High resistance
Litao3 on sapphire
Low loss SAW
Low-loss
Parasitic surface conduction
Parasitic surface conduction effect
Sapphire substrates
SAW device
Simple structures
AlN Hybrid-Coupled Resonators With High Acoustic Velocity Layer
会议论文
PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), Las Vegas, NV, SEP 07-11, 2020
作者:
Kangfu Liu
;
Junrui Liang
;
Tao Wu
Adobe PDF(628Kb)
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收藏
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浏览/下载:325/1
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提交时间:2022/11/08
Aluminum Nitride (AlN)
SiC
quasi-SAW/BAW
Hybrid-coupled mode
Aluminum nitride
Silicon carbide
Nitrides
Piezoelectricity
Thin films
Acoustic resonators
Acoustic surface wave filters
Acoustic wave velocity
Electromechanical coupling
Barium compounds
III-V semiconductors
Aluminum nitride (AlN)
Bulk acoustic waves
Coupled resonator
Electromechanical coupling coefficients
Mechanical robustness
Multiple frequency
Piezoelectric coefficient
Vertical direction
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