Study on multi-wavelength thin film thickness determination method

doi:10.11972/j.issn.1001-9014.2024.06.012

	Study on multi-wavelength thin film thickness determination method
	Shi, Ce1,2,3,4 ; Xie, Mao-Bin 2,3,4; Zheng, Wei-Bo 5; Ji, Ruo-Nan 2,3,4; Wang, Shao-Wei 2,3,4; Lu, Wei1,2,3
	2024-12-01
发表期刊	JOURNAL OF INFRARED AND MILLIMETER WAVES (IF:0.6[JCR-2023],0.5[5-Year])
ISSN	1001-9014
卷号	43 期号:6 页码:813-819
DOI	10.11972/j.issn.1001-9014.2024.06.012
摘要	This work introduces a novel method for measuring thin film thickness, employing a multi-wavelength method that significantly reduces the need for broad-spectrum data. Unlike traditional techniques that require several hundred spectral data points, the multi-wavelength method achieves precise thickness measurements with data from only 10 wavelengths. This innovation not only simplifies the process of spectral measurement analysis but also enables accurate real-time thickness measurement on industrial coating production lines. The method effectively reconstructs and fits the visible spectrum (400-800 nm) using a minimal amount of data, while maintaining measurement error within 7. 1%. This advancement lays the foundation for more practical and efficient thin film thickness determination techniques in various industrial applications.
关键词	film thickness determination transmittance and reflectance spectra fitting spectral reconstruction
URL	查看原文
收录类别	SCI ; EI
语种	英语
资助项目	National Key R&D Program of China[2021YFA0715500] ; National Natural Science Foundation of China (NSFC)[12227901] ; Strategic Priority Research Program (B) of the Chinese Academy of Sciences[XDB0580000] ; Shanghai Municipal Science and Technology Major Project[2019SHZDZX01] ; Chinese Academy of Sciences President's International Fellowship Initiative[2021PT0007]
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:001384519000012
出版者	SCIENCE PRESS
来源库	cqvip
中图分类号	O43
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/364723
专题	物质科学与技术学院物质科学与技术学院_特聘教授组_陆卫组物质科学与技术学院_硕士生
通讯作者	Wang, Shao-Wei; Lu, Wei
作者单位	1.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China 3.Shanghai Engn Res Ctr Energy Saving Coatings, Shanghai 200083, Peoples R China 4.Shanghai Key Lab Opt Coatings & Spectral Modulat, Shanghai 200083, Peoples R China 5.Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
第一作者单位	物质科学与技术学院
通讯作者单位	物质科学与技术学院
第一作者的第一单位	物质科学与技术学院
推荐引用方式 GB/T 7714	Shi, Ce,Xie, Mao-Bin,Zheng, Wei-Bo,et al. Study on multi-wavelength thin film thickness determination method[J]. JOURNAL OF INFRARED AND MILLIMETER WAVES,2024,43(6):813-819.
APA	Shi, Ce,Xie, Mao-Bin,Zheng, Wei-Bo,Ji, Ruo-Nan,Wang, Shao-Wei,&Lu, Wei.(2024).Study on multi-wavelength thin film thickness determination method.JOURNAL OF INFRARED AND MILLIMETER WAVES,43(6),813-819.
MLA	Shi, Ce,et al."Study on multi-wavelength thin film thickness determination method".JOURNAL OF INFRARED AND MILLIMETER WAVES 43.6(2024):813-819.