上海科技大学知识管理系统

Printing metallic nanoscale features remains challenging, but particularlyimportant for making electronic devices. In existing techniques, complexoperation, and material parameters significantly limit printing resolution,materials development, and real-time control. Alternatively, aerosols and ionsare synergized to print nanoscale metals, but the ions turn out to be instable,thereby making the printing lose the ability in controlling feature sizes. Hereinelectrically biased parallel planes are utilized to configure electric fields forprogrammable and parallel printing of aerosol nanoparticles into high-purity(>98.5 wt.%) nanoscale features in arrays over large areas (≈mm2). Byapplying different potentials to three horizontal parallel planes, with themiddle plane containing periodic circular perforations, the fields areconfigured into repeating “funnels” with sizes controllable at both ends.Charged nanoparticles are then subjected to a gas flow orthogonal to the fieldassembling them to 3D nanoarchitectures. The “funnels” size is predictableand used to control the feature sizes. The printed nanopillars are modulatedfrom 67 to 743 nm in diameters with aspect ratios up to 25 and showexcellent mechanical and electrical properties. The programmable and parallelnanoprinting of metallic nanoscale features offers an enabling technology foraccelerating the development of next-generation high-frequency ultra-largescale integrated electronic devices.