Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method
2023-01
Source PublicationMICROMACHINES
EISSN2072-666X
Volume14Issue:1
Status已发表
DOI10.3390/mi14010205
AbstractDue to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proximity correction (OPC). This method can avoid the tip discharge problem of SAW filters by suppressing the problem of rounding and shrinking of dummy electrode and electrode tail caused by OPE. This method increases the quality factor (Q) of the SAW resonator and thus decreases the insertion loss of the SAW filter. The filter increases the bandwidth by 1.8 MHz at −1.5 dB after applying the OPC method. Additionally, it improves the stability of the filter under high power conditions. © 2023 by the authors.
KeywordAcoustic surface wave filters Acoustic waves Lithium compounds Resonators Tantalum compounds Correction method Design Patterns Optical proximity effect Optical proximity effect correction Optical proximity effect corrections Optical proximity effects Performance Photoresistance Surface acoustic wave resonators Surface-acoustic-wave filters
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Indexed ByEI ; SCI ; SCOPUS
Language英语
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS SubjectChemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:000927179700001
PublisherMDPI
EI Accession Number20230413430003
EI KeywordsElectrodes
EI Classification Number751.1 Acoustic Waves ; 752.1 Acoustic Devices
Original Document TypeJournal article (JA)
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Document Type期刊论文
Identifierhttps://kms.shanghaitech.edu.cn/handle/2MSLDSTB/281942
Collection信息科学与技术学院_PI研究组_吴涛组
信息科学与技术学院_博士生
Corresponding AuthorLuo, Ping; Wu, Tao
Affiliation
1.Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China
2.Shanghai Bawnovat Co Ltd, Shanghai 200120, Peoples R China
3.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China
4.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
5.Univ Chinese Acad Sci, Beijing 100864, Peoples R China
6.Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 201210, Peoples R China
Corresponding Author AffilicationSchool of Information Science and Technology
Recommended Citation
GB/T 7714
Luo, Ping,Zou, Yali,Yang, Xinyu,et al. Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method[J]. MICROMACHINES,2023,14(1).
APA Luo, Ping.,Zou, Yali.,Yang, Xinyu.,Li, Juntao.,Huang, Xuan.,...&Wu, Tao.(2023).Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method.MICROMACHINES,14(1).
MLA Luo, Ping,et al."Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method".MICROMACHINES 14.1(2023).
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