Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method

doi:10.3390/mi14010205

	Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method
	Luo, Ping 1; Zou, Yali 1,2; Yang, Xinyu 2; Li, Juntao 2; Huang, Xuan 2; Zhou, Jian 2; Han, Xing 2; Liu, Yushuai3,4,5 ; Liu, Yuhao 1; Wu, Tao3,4,5,6
	2023-01
发表期刊	MICROMACHINES
EISSN	2072-666X
卷号	14 期号:1
发表状态	已发表
DOI	10.3390/mi14010205
摘要	Due to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proximity correction (OPC). This method can avoid the tip discharge problem of SAW filters by suppressing the problem of rounding and shrinking of dummy electrode and electrode tail caused by OPE. This method increases the quality factor (Q) of the SAW resonator and thus decreases the insertion loss of the SAW filter. The filter increases the bandwidth by 1.8 MHz at −1.5 dB after applying the OPC method. Additionally, it improves the stability of the filter under high power conditions. © 2023 by the authors.
关键词	Acoustic surface wave filters Acoustic waves Lithium compounds Resonators Tantalum compounds Correction method Design Patterns Optical proximity effect Optical proximity effect correction Optical proximity effect corrections Optical proximity effects Performance Photoresistance Surface acoustic wave resonators Surface-acoustic-wave filters
URL	查看原文
收录类别	EI ; SCI ; SCOPUS
语种	英语
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000927179700001
出版者	MDPI
EI入藏号	20230413430003
EI主题词	Electrodes
EI分类号	751.1 Acoustic Waves ; 752.1 Acoustic Devices
原始文献类型	Journal article (JA)
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/281942
专题	信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_博士生
通讯作者	Luo, Ping; Wu, Tao
作者单位	1.Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China 2.Shanghai Bawnovat Co Ltd, Shanghai 200120, Peoples R China 3.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China 4.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China 5.Univ Chinese Acad Sci, Beijing 100864, Peoples R China 6.Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 201210, Peoples R China
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Luo, Ping,Zou, Yali,Yang, Xinyu,et al. Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method[J]. MICROMACHINES,2023,14(1).
APA	Luo, Ping.,Zou, Yali.,Yang, Xinyu.,Li, Juntao.,Huang, Xuan.,...&Wu, Tao.(2023).Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method.MICROMACHINES,14(1).
MLA	Luo, Ping,et al."Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method".MICROMACHINES 14.1(2023).