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| Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method | |
| 2023-01 | |
| Source Publication | MICROMACHINES
 |
| EISSN | 2072-666X |
| Volume | 14Issue:1 |
| Status | 已发表 |
| DOI | 10.3390/mi14010205 |
| Abstract | Due to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proximity correction (OPC). This method can avoid the tip discharge problem of SAW filters by suppressing the problem of rounding and shrinking of dummy electrode and electrode tail caused by OPE. This method increases the quality factor (Q) of the SAW resonator and thus decreases the insertion loss of the SAW filter. The filter increases the bandwidth by 1.8 MHz at −1.5 dB after applying the OPC method. Additionally, it improves the stability of the filter under high power conditions. © 2023 by the authors. |
| Keyword | Acoustic surface wave filters Acoustic waves Lithium compounds Resonators Tantalum compounds Correction method Design Patterns Optical proximity effect Optical proximity effect correction Optical proximity effect corrections Optical proximity effects Performance Photoresistance Surface acoustic wave resonators Surface-acoustic-wave filters |
| URL | 查看原文 |
| Indexed By | EI ; SCI ; SCOPUS |
| Language | 英语 |
| WOS Research Area | Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| WOS Subject | Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied |
| WOS ID | WOS:000927179700001 |
| Publisher | MDPI |
| EI Accession Number | 20230413430003 |
| EI Keywords | Electrodes |
| EI Classification Number | 751.1 Acoustic Waves ; 752.1 Acoustic Devices |
| Original Document Type | Journal article (JA) |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/281942 |
| Collection | 信息科学与技术学院_PI研究组_吴涛组 信息科学与技术学院_博士生 |
| Corresponding Author | Luo, Ping; Wu, Tao |
| Affiliation | 1.Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China 2.Shanghai Bawnovat Co Ltd, Shanghai 200120, Peoples R China 3.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China 4.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China 5.Univ Chinese Acad Sci, Beijing 100864, Peoples R China 6.Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 201210, Peoples R China |
| Corresponding Author Affilication | School of Information Science and Technology |
| Recommended Citation GB/T 7714 | Luo, Ping,Zou, Yali,Yang, Xinyu,et al. Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method[J]. MICROMACHINES,2023,14(1). |
| APA | Luo, Ping.,Zou, Yali.,Yang, Xinyu.,Li, Juntao.,Huang, Xuan.,...&Wu, Tao.(2023).Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method.MICROMACHINES,14(1). |
| MLA | Luo, Ping,et al."Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method".MICROMACHINES 14.1(2023). |
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