Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline β-Ga2O3 thin film on SiC

doi:doi.org/10.1016/j.fmre.2021.11.003

	Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline β-Ga2O3 thin film on SiC
	Wenhui Xu1,7 ; Tiangui You 1; Yibo Wang 2; Zhenghao Shen 1; Kang Liu 3; Lianghui Zhang 3; Huarui Sun 3; Ruijie Qian 4; Zhenghua An 4; Fengwen Mu 4; Tadatomo Suga 5; Genquan Han 2; Xin Ou 1; Yue Hao 2; Xi Wang 1
	2021-11-14
发表期刊	FUNDAMENTAL RESEARCH (IF:5.7[JCR-2023],5.7[5-Year])
ISSN	2667-3258
发表状态	已发表
DOI	doi.org/10.1016/j.fmre.2021.11.003
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/183465
专题	物质科学与技术学院_博士生
通讯作者	Tiangui You; Genquan Han; Xin Ou
作者单位	1.State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China 2.The State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China 3.School of Science and Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology, Shenzhen 518055, China 4.Department of Physics, State Key Laboratory of Surface Physics, Institute of Nanoelectronic Devices and Quantum Computing, Fudan University, Shanghai 200433, China 5.High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China 6.Collaborative Research Center, Meisei University, Hino, Japan 7.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式 GB/T 7714	Wenhui Xu,Tiangui You,Yibo Wang,et al. Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline β-Ga2O3 thin film on SiC[J]. FUNDAMENTAL RESEARCH,2021.
APA	Wenhui Xu.,Tiangui You.,Yibo Wang.,Zhenghao Shen.,Kang Liu.,...&Xi Wang.(2021).Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline β-Ga2O3 thin film on SiC.FUNDAMENTAL RESEARCH.
MLA	Wenhui Xu,et al."Efficient thermal dissipation in wafer-scale heterogeneous integration of single-crystalline β-Ga2O3 thin film on SiC".FUNDAMENTAL RESEARCH (2021).