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| Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film | |
| 2021-09 | |
| 发表期刊 | MICROMACHINES
 |
| EISSN | 2072-666X |
| 卷号 | 12期号:9 |
| DOI | 10.3390/mi12091039 |
| 摘要 | This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc. © 2021 by the authors. Licensee MDPI, Basel, Switzerland. |
| 关键词 | Electromechanical coupling Lithium Lithium compounds Niobium compounds Resonators Shear flow Shear waves Signal processing Temperature Electromechanical coupling coefficients High frequency HF Lithium niobate thin films Low temperature drifts Operating frequency Shear wave resonators Signal processing devices Suspended structure YBAR bulk acoustic resonator (BAR) solid mounted resonator (SMR) LiNbO3 film |
| URL | 查看原文 |
| 收录类别 | EI ; SCIE |
| 语种 | 英语 |
| WOS研究方向 | Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| WOS类目 | Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied |
| WOS记录号 | WOS:000700006600001 |
| 出版者 | MDPI |
| EI入藏号 | 20213610872721 |
| EI主题词 | Electromechanical devices |
| EI分类号 | 542.4 Lithium and Alloys ; 631.1 Fluid Flow, General ; 641.1 Thermodynamics ; 716.1 Information Theory and Signal Processing ; 931.1 Mechanics |
| 原始文献类型 | Journal article (JA) |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/133332 |
| 专题 | 信息科学与技术学院_PI研究组_吴涛组 信息科学与技术学院_博士生 |
| 通讯作者 | Yu, Si-Yuan; Chen, Yan-Feng |
| 作者单位 | 1.National Laboratory of Solid State Microstructures & Department of Materials Science and Engineering, Nanjing University, Nanjing; 210093, China; 2.State Key Lab of Crystal Materials, Shandong University, Shandong; 250100, China; 3.School of Information Science and Technology, ShanghaiTech University, Shanghai; 201210, China; 4.Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing; 210093, China |
| 推荐引用方式 GB/T 7714 | Qin, Zhen-Hui,Wu, Shu-Mao,Wang, Yong,et al. Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film[J]. MICROMACHINES,2021,12(9). |
| APA | Qin, Zhen-Hui.,Wu, Shu-Mao.,Wang, Yong.,Liu, Kang-Fu.,Wu, Tao.,...&Chen, Yan-Feng.(2021).Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film.MICROMACHINES,12(9). |
| MLA | Qin, Zhen-Hui,et al."Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film".MICROMACHINES 12.9(2021). |
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