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| Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film | |
| 2021-09 | |
| Source Publication | MICROMACHINES
 |
| EISSN | 2072-666X |
| Volume | 12Issue:9 |
| DOI | 10.3390/mi12091039 |
| Abstract | This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc. © 2021 by the authors. Licensee MDPI, Basel, Switzerland. |
| Keyword | Electromechanical coupling Lithium Lithium compounds Niobium compounds Resonators Shear flow Shear waves Signal processing Temperature Electromechanical coupling coefficients High frequency HF Lithium niobate thin films Low temperature drifts Operating frequency Shear wave resonators Signal processing devices Suspended structure YBAR bulk acoustic resonator (BAR) solid mounted resonator (SMR) LiNbO3 film |
| URL | 查看原文 |
| Indexed By | EI ; SCIE |
| Language | 英语 |
| WOS Research Area | Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| WOS Subject | Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied |
| WOS ID | WOS:000700006600001 |
| Publisher | MDPI |
| EI Accession Number | 20213610872721 |
| EI Keywords | Electromechanical devices |
| EI Classification Number | 542.4 Lithium and Alloys ; 631.1 Fluid Flow, General ; 641.1 Thermodynamics ; 716.1 Information Theory and Signal Processing ; 931.1 Mechanics |
| Original Document Type | Journal article (JA) |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/133332 |
| Collection | 信息科学与技术学院_PI研究组_吴涛组 信息科学与技术学院_博士生 |
| Corresponding Author | Yu, Si-Yuan; Chen, Yan-Feng |
| Affiliation | 1.National Laboratory of Solid State Microstructures & Department of Materials Science and Engineering, Nanjing University, Nanjing; 210093, China; 2.State Key Lab of Crystal Materials, Shandong University, Shandong; 250100, China; 3.School of Information Science and Technology, ShanghaiTech University, Shanghai; 201210, China; 4.Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing; 210093, China |
| Recommended Citation GB/T 7714 | Qin, Zhen-Hui,Wu, Shu-Mao,Wang, Yong,et al. Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film[J]. MICROMACHINES,2021,12(9). |
| APA | Qin, Zhen-Hui.,Wu, Shu-Mao.,Wang, Yong.,Liu, Kang-Fu.,Wu, Tao.,...&Chen, Yan-Feng.(2021).Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film.MICROMACHINES,12(9). |
| MLA | Qin, Zhen-Hui,et al."Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film".MICROMACHINES 12.9(2021). |
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