Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

doi:10.3390/s20247264

	Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator
	Xia, Dunzhu 1; Zhang, Bing 1; Wu, Hao 2; Wu, Tao3
	2020-12
发表期刊	SENSORS
卷号	20 期号:24
发表状态	已发表
DOI	10.3390/s20247264
摘要	In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The WGM optical transmission coupling model was analyzed and compared by adjusting key parameters, such as the cavity radius, the waveguide width, and the gap between them for silicon and silicon nitride materials in simulations, which will greatly affect the quality factor (Q) of the WGM resonator. Furthermore, the structural parameters of the disk resonant gyroscope were also optimized. Then, the fabrication process was optimized to overcome the difficulties in the realization of micro-optical devices. Finally, a gyroscope prototype with the integrated WGM resonator was verified experimentally. The scale factor and bias instability performance of the MOEMS gyroscope was 2.63 mv/degrees/s and 4.0339 degrees/h, respectively.
关键词	MOEMS gyroscope WGM resonator quality factor improvement MEMS fabrication process
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收录类别	SCI ; SCIE ; EI
语种	英语
资助项目	China's National Natural Science Foundation[61571127][61871125][61874073] ; Joint Fund of Ministry of Education for Equipment and Pre-research[6141A02022333] ; Pre-research Fund[61405170103] ; Natural Science Foundation of Shanghai[19ZR1477000]
WOS研究方向	Chemistry ; Engineering ; Instruments & Instrumentation
WOS类目	Chemistry, Analytical ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS记录号	WOS:000603287500001
出版者	MDPI
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/124975
专题	信息科学与技术学院_PI研究组_吴涛组
通讯作者	Xia, Dunzhu
作者单位	1.Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Peoples R China 2.Huaihai Ind Grp, Changzhi 046000, Peoples R China 3.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China
推荐引用方式 GB/T 7714	Xia, Dunzhu,Zhang, Bing,Wu, Hao,et al. Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator[J]. SENSORS,2020,20(24).
APA	Xia, Dunzhu,Zhang, Bing,Wu, Hao,&Wu, Tao.(2020).Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator.SENSORS,20(24).
MLA	Xia, Dunzhu,et al."Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator".SENSORS 20.24(2020).