AlN MEMS filters with extremely high bandwidth widening capability

doi:10.1038/s41378-020-00183-5

	AlN MEMS filters with extremely high bandwidth widening capability
	Gao, Anming 1; Liu, Kangfu 2,3; Liang, Junrui2,3 ; Wu, Tao1,2,3
	2020-09-07
发表期刊	MICROSYSTEMS & NANOENGINEERING (IF:7.3[JCR-2023],7.7[5-Year])
ISSN	2055-7434
卷号	6 期号:1
DOI	10.1038/s41378-020-00183-5
摘要	This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonators set the center frequency and provide electromechanical coupling to construct the filters, while the lumped-element-based matching networks help widen the bandwidth (BW) and enhance the out-of-band rejection. Aluminum nitride (AlN) S0 Lamb wave resonators are then applied to the proposed filtering topologies. AlN S0 first- and second-order wideband filters are studied and have shown prominent performance. Finally, the AlN S0 first-order wideband filter is experimentally implemented and characterized. The demonstrated first-order filter shows a large fractional bandwidth (FBW) of 5.6% (achieved with a resonator coupling of 0.94%) and a low insertion loss (IL) of 1.84dB. The extracted bandwidth widening factor (BWF) is 6, which is approximately 12 times higher than those of the current ladder or lattice filtering topologies. This impressive bandwidth widening capability holds great potential for satisfying the stringent BW requirements of bands n77, n78, and n79 of 5G new radio (NR) and will overcome an outstanding technology hurdle in placing 5G NR into the marketplace.
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收录类别	SCI ; SCIE ; EI
语种	英语
WOS研究方向	Science & Technology - Other Topics ; Instruments & Instrumentation
WOS类目	Nanoscience & Nanotechnology ; Instruments & Instrumentation
WOS记录号	WOS:000570227100001
出版者	NATURE PUBLISHING GROUP
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/123575
专题	信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_PI研究组_梁俊睿组信息科学与技术学院_硕士生
通讯作者	Wu, Tao
作者单位	1.Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61820 USA; 2.ShanghaiTech Univ, Sch Informat Sci & Technol SIST, Shanghai 201210, Peoples R China; 3.Univ Chinese Acad Sci, 19 A Yuquan Rd, Beijing, Peoples R China
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Gao, Anming,Liu, Kangfu,Liang, Junrui,et al. AlN MEMS filters with extremely high bandwidth widening capability[J]. MICROSYSTEMS & NANOENGINEERING,2020,6(1).
APA	Gao, Anming,Liu, Kangfu,Liang, Junrui,&Wu, Tao.(2020).AlN MEMS filters with extremely high bandwidth widening capability.MICROSYSTEMS & NANOENGINEERING,6(1).
MLA	Gao, Anming,et al."AlN MEMS filters with extremely high bandwidth widening capability".MICROSYSTEMS & NANOENGINEERING 6.1(2020).