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A Circular Crested Lamb Wave Resonator with Spurious Mode Suppression and Quality Factor Enhancement 预印本
2025
作者:  Lu, Xianzheng;  Lou, Liang;  Ren, Hao
收藏  |  浏览/下载：80/0  |  提交时间：2025/02/24
Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film 期刊论文
APPLIED PHYSICS LETTERS, 2024, 卷号: 124, 期号: 19
作者:  Du, Mingye;  Huang, Feixuan;  Li, Jiawei;  Liu, Yushuai;  Xu, Xuankai
Adobe PDF(2220Kb)  |  收藏  |  浏览/下载：426/49  |  提交时间：2024/05/24
An One-port A2 Mode AlN Lamb Wave Resonator Based on SOI Substrate 会议论文
18TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2023, Jeju, Korea, May 14, 2023 - May 17, 2023
作者:  Xianzheng Lu;  Hao Ren
Adobe PDF(549Kb)  |  收藏  |  浏览/下载：366/0  |  提交时间：2023/09/08
Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate 会议论文
INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC., deu,Munich, 2023-01-15
作者:  Wu, Jinbo;  Zhang, Shibin;  Zheng, Pengcheng;  Zhang, Liping;  Yao, Hulin
Adobe PDF(4292Kb)  |  收藏  |  浏览/下载：415/1  |  提交时间：2023/03/24
Influence of Electrode Duty Factor on the Performance of Lamb-Wave AlN Resonators on SOI Substrate 会议论文
17TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2022, Virtual, Online, Taiwan, April 14, 2022 - April 17, 2022
作者:  Haichao Cao;  Hao Ren
Adobe PDF(2426Kb)  |  收藏  |  浏览/下载：232/2  |  提交时间：2022/07/29
Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate 会议论文
IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES, Tokyo, Japan, January 9, 2022 - January 13, 2022
作者:  Wu, Jinbo;  Zhang, Shibin;  Zhou, Hongyan;  Zhang, Liping;  Zheng, Pengcheng
Adobe PDF(3105Kb)  |  收藏  |  浏览/下载：466/1  |  提交时间：2022/04/08
Multiferroic Magnetic Sensor Based on AlN and Al0.7Sc0.3N thin film S 会议论文
IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, IUS, Virtual, Online, China, September 11, 2011 - September 16, 2011
作者:  Wang, Yuxi;  Liu, Kangfu;  Shao, Shuai;  Kim, Jangyong;  Wu, Tao
Adobe PDF(730Kb)  |  收藏  |  浏览/下载：436/2  |  提交时间：2022/07/01
Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication 期刊论文
MICROELECTRONIC ENGINEERING, 2021, 卷号: 242
作者:  Luo, Zhifang;  Shao, Shuai;  Wu, Tao
Adobe PDF(3189Kb)  |  收藏  |  浏览/下载：453/0  |  提交时间：2021/06/04
Wide Bandwidth Lorentz-Force Magnetometer Based on Lateral Overtone Bulk Acoustic Resonator 会议论文
PROCEEDINGS OF THE IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), Virtual, Gainesville, FL, United states, January 25, 2021 - January 29, 2021
作者:  Shuai Shao;  Anming Gao;  Yuxi Wang;  Tao Wu
Adobe PDF(1763Kb)  |  收藏  |  浏览/下载：478/2  |  提交时间：2021/12/03
Optimization of AlN and AlScN Film ICP Etching 会议论文
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), ELECTR NETWORK, JAN 25-29, 2021
作者:  Zhifang Luo;  Shuai Shao;  Tao Wu
Adobe PDF(1221Kb)  |  收藏  |  浏览/下载：472/1  |  提交时间：2021/07/23
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