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High Round-Trip Gain Piezoelectric-Capacitive Hybrid Micromachined Ultrasonic Transducer Based on Anodic Bonding Technology
期刊论文
IEEE SENSORS JOURNAL, 2025, 卷号: PP, 期号: 99
作者:
Yan Wang
;
Weijing Xu
;
Ning Lv
;
Tao Wu
;
Jia Zhou
Adobe PDF(25070Kb)
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收藏
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浏览/下载:38/1
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提交时间:2025/03/31
Bonding
Integrated circuit design
Microfabrication
Piezoelectricity
Structural analysis
Structural dynamics
Ultrasonic imaging
Ultrasonic transducers
Anodic bonding technology
Bonding process
Capacitive micromachined ultrasonic transducer
Capacitive transducers
Micro-fabrication
Micro-machined ultrasonic transducer
Piezoelectric
Piezoelectric layers
Pulse echoes
Round trip
Direct In- and Out-of-Plane Writing of Metals on Insulators by Electron-Beam-Enabled, Confined Electrodeposition with Submicrometer Feature Size
期刊论文
SMALL METHODS, 2024, 卷号: 8, 期号: 7
作者:
Nydegger, Mirco
;
Wang, Zhu-Jun
;
Willinger, Marc Georg
;
Spolenak, Ralph
;
Reiser, Alain
Adobe PDF(2397Kb)
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浏览/下载:212/1
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提交时间:2024/01/19
3D printing
Additives
Alumina
Aluminum oxide
Electrodeposition
Electrodes
Electrolytes
Electron beams
Electrons
Metal substrates
Microanalysis
Microfabrication
Nanotechnology
Scanning electron microscopy
3D nanofabrication
Electrolyte reservoirs
Electron-beam
Feature sizes
Localised
Microfabrication process
Microscale
Nano scale
Out-of-plane
Submicrometers
3D-to-3D Microscale Shape-Morphing from Configurable Helices with Controlled Chirality
期刊论文
ACS APPLIED MATERIALS & INTERFACES, 2021, 卷号: 13, 期号: 51, 页码: 61723-61732
作者:
Zhao, Zhenyu
;
He, Yisheng
;
Meng, Xiao
;
Ye, Chunhong
Adobe PDF(3030Kb)
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|
浏览/下载:483/1
|
提交时间:2022/11/08
shape configuration
microfabrication
chirality
responsive polymers
microrobotic
Shape configuration, Microfabrication, Chirality, Responsive polymers, Micro-robotic
Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate
期刊论文
MICROMACHINES, 2021, 卷号: 12, 期号: 2, 页码: #VALUE!
作者:
Fei, Sitao
;
Ren, Hao
Adobe PDF(4732Kb)
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收藏
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浏览/下载:1005/458
|
提交时间:2021/04/01
MEMS AlN resonator
contour mode
heavily doped silicon
temperature coefficient of frequency (TCF)
cryogenic characteristics
Acoustic wave velocity
Acoustic wave velocity measurement
Aluminum nitride
Electrodes
III
V semiconductors
Natural frequencies
Silicon on insulator technology
Temperature
Thermal conductivity
Aluminum nitride (AlN)
Heavily doped silicons
High thermal conductivity
Microfabrication process
Silicon
on
insulators (SOI)
Temperature characteristic
Temperature coefficient of frequencies
Temperature hysteresis
Development of TES-based X-ray Microcalorimeters for HUBS
会议论文
SPACE TELESCOPES AND INSTRUMENTATION 2020: ULTRAVIOLET TO GAMMA RAY, ELECTR NETWORK, DEC 14-18, 2020
作者:
Adobe PDF(1524Kb)
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浏览/下载:284/0
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提交时间:2021/08/27
HUBS
Mo/Cu bilayer film
microfabrication
transition-edge sensor
A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding
期刊论文
MICROMACHINES, 2020, 卷号: 11, 期号: 2
作者:
Qi, Jia
;
Li, Wenbo
;
Chu, Wei
;
Yu, Jianping
;
Wu, Miao
Adobe PDF(1832Kb)
|
收藏
|
浏览/下载:327/0
|
提交时间:2020/04/08
ultrafast laser microfabrication
microfluidic
glass bonding
Three-Dimensional Laser Printing of Macro-Scale Glass Objects at a Micro-Scale Resolution
期刊论文
MICROMACHINES, 2019, 卷号: 10, 期号: 9
作者:
Wang, Peng
;
Chu, Wei
;
Li, Wenbo
;
Tan, Yuanxin
Adobe PDF(2404Kb)
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收藏
|
浏览/下载:695/227
|
提交时间:2019/10/28
ultrafast laser microfabrication
3D glass printing
light-field manipulation
Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser
期刊论文
INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2017, 卷号: 11, 期号: 1, 页码: 47-54
作者:
Fang, Zhiwei
;
Yao, Ni
;
Wang, Min
;
Lin, Jintian
;
Zhang, Jianhao
Adobe PDF(365Kb)
|
收藏
|
浏览/下载:1524/371
|
提交时间:2018/01/05
Double disk
integrated optics
lithium niobate
microfabrication
microresonator
On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater
期刊论文
INTERNATIONAL JOURNAL OF OPTOMECHATRONICS, 2015, 卷号: 9, 期号: 2, 页码: 187-194
作者:
Tang, Jialei
;
Lin, Jintian
;
Song, Jiangxin
;
Fang, Zhiwei
;
Wang, Min
Adobe PDF(806Kb)
|
收藏
|
浏览/下载:2106/437
|
提交时间:2017/07/04
microfabrication
integrated optics
microresonator
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