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Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2025, 卷号: 34, 期号: 2, 页码: 194-203
作者:
Yang Li
;
Jiawei Li
;
Tao Wu
Adobe PDF(5299Kb)
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浏览/下载:74/2
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提交时间:2025/03/03
Acoustic delay lines - Guided electromagnetic wave propagation - Indium phosphide - Linear actuators - Nitrides - Piezoelectric transducers - Scandium - Scandium compounds - Ultrasonic transducers - Ultrasonic waves
Electrode layout - Element method - Phase relationships - Propagation loss - Reflected waves - Scandium doped aluminum nitride - Single-phase unidirectional transducers - Symmetrics - Theoretical modeling - Unit cells
Electrically tunable GHz acoustic waveguide using Al
0.7
Sc
0.3
N thin film
期刊论文
APPLIED PHYSICS LETTERS, 2025, 卷号: 126, 期号: 9
作者:
Li, Jiawei
;
Xu, Xuankai
;
Li, Yang
;
Wu, Tao
Adobe PDF(3005Kb)
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浏览/下载:68/3
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提交时间:2025/03/25
Chirp modulation
Phase shift
Scandium compounds
Surface discharges
Acoustic waveguides
Acoustics waves
Aluminium-scandium
Dynamic modulation
Electrically tunable
Nitride thin films
Simulation approach
Thin-films
Vertical electric fields
Waveguide widths
Silicon-integrated scandium-doped aluminum nitride electro-optic modulator
期刊论文
PHOTONICS RESEARCH, 2025, 卷号: 13, 期号: 2, 页码: 477-487
作者:
Xu, Tianqi
;
Liu, Yushuai
;
Pu, Yuanmao
;
Yang, Yongxiang
;
Zhong, Qize
Adobe PDF(1147Kb)
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浏览/下载:401/6
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提交时间:2024/06/24
Aluminum gallium nitride - Amplitude shift keying - CMOS integrated circuits - Digital filters - Electrooptical devices - Fiber optic sensors - Frequency shift keying - Indium phosphide - Light modulation - Light modulators - Notch filters - Phase shift keying - Photonic integrated circuits - Photonic integration technology - Ring lasers - Scandium compounds - Semiconducting aluminum compounds - Semiconducting indium phosphide - Signal modulation - Silicon nitride
Electro-optic modulators - Electro-optics - Fabrication and characterizations - Functional devices - Hexagonal wurtzite structure - Nonlinear properties - Photonic circuits - Piezoelectric property - Seamless integration - Second orders
Highly Doped Single Crystal Al $_{\text{1}-\textit{x}}$ Sc $_{\textit{x}}$ N Bulk Acoustic Resonators for High-Frequency and Wideband Applications
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2024, 卷号: 71, 期号: 10, 页码: 6329-6335
作者:
Congquan Zhou
;
Wentong Dou
;
Ruidong Qin
;
Jinghong Lu
;
Yumeng Yang
Adobe PDF(3103Kb)
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浏览/下载:90/2
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提交时间:2024/08/26
III-V semiconductor materials
Aluminum nitride
Resonators
Piezoelectric films
Stress
Surface roughness
Rough surfaces
Acoustic resonator
aluminum scandium (Sc) nitride
bulk acoustic wave (BAW) filter
cavity-embedded
single crystal
Demonstration of acousto-optical modulation based on a thin-film AlScN photonic platform
期刊论文
PHOTONICS RESEARCH, 2024, 卷号: 12, 期号: 6, 页码: 1138-1149
作者:
Adobe PDF(2215Kb)
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浏览/下载:354/4
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提交时间:2024/06/21
Acoustic waves
Aluminum nitride
CMOS integrated circuits
Light modulation
MOS devices
Optical signal processing
Oxide semiconductors
Scandium
Scandium compounds
Thick films
Thin film circuits
Acousto-optic modulations
Acousto-optic modulator
Complementary metal-oxide-semiconductor technologies
Fabrication process
Microwave signal processing
Modulation technologies
On chips
Optical signal-processing
Piezoelectric property
Thin-films
Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer
期刊论文
NANOSCALE, 2024, 卷号: 16, 期号: 21
作者:
Luo, Zhifang
;
Li, Dongxiao
;
Le, Xianhao
;
He, Tianyiyi
;
Shao, Shuai
Adobe PDF(2961Kb)
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浏览/下载:340/4
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提交时间:2024/05/11
Acoustic surface wave devices
Acoustic waves
Aluminum nitride
Electromechanical devices
Graphene
III-V semiconductors
MEMS
MOS devices
Nitrides
Oxide semiconductors
'current
Aluminium-scandium
Complementary metal oxide semiconductor process
Graphene oxides
Low sensitivity
Microelectromechanical-systems technologies
Oxide layer
Performance
Sensing areas
Sensor limits
Topological Valley Hall Edge State of Lamb Wave in Aluminum Scandium Nitride Thin Film
会议论文
2023 IEEE 23RD INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (NANO), Jeju City, Korea, Republic of, 2-5 July 2023
作者:
Zhifang Luo
;
Shuai Shao
;
Chengkuo Lee
;
Tao Wu
Adobe PDF(825Kb)
|
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浏览/下载:316/2
|
提交时间:2023/10/07
Band structures
Acoustic waveguides
Prototypes
Scandium
Bandwidth
Information processing
Crystals
Microwave-induced thermoacoustic imaging with a multi-cell AlScN piezoelectric micromachined ultrasonic transducer
期刊论文
APPLIED PHYSICS LETTERS, 2023, 卷号: 122, 期号: 13
作者:
Adobe PDF(2264Kb)
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浏览/下载:483/4
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提交时间:2023/04/21
Aluminum compounds
Diagnosis
III-V semiconductors
Piezoelectric transducers
Piezoelectricity
Thermoacoustics
Ultrasonic applications
Ultrasonic transducers
Aluminium-scandium
Biological information
Clinical diagnosis
Micro-machined ultrasonic transducer
Microwave pulse
Microwave-induced
Multicell
Piezoelectric
Thermoacoustic imaging
Thermoacoustic signals
Electro-acoustic Phase Modulator based on AlScN Thin Film
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2023, 卷号: 44, 期号: 5, 页码: 817-820
作者:
Shuai Shao
;
Zhifang Luo
;
Tao Wu
Adobe PDF(1818Kb)
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浏览/下载:468/4
|
提交时间:2023/04/18
Electro-acoustic effect
phase modulator
aluminum scandium nitride
phononic integrated circuit
In Situ Synchrotron XRD Characterization of Piezoelectric Al1−xScxN Thin Films for MEMS Applications
期刊论文
MATERIALS;, 2023, 卷号: 16, 期号: 5
作者:
Jiang, Wenzheng
;
Zhu, Lei
;
Chen, Lingli
;
Yang, Yumeng
;
Yu, Xi
Adobe PDF(3774Kb)
|
收藏
|
浏览/下载:1061/541
|
提交时间:2023/03/24
aluminum scandium nitride
micro-electromechanical system
piezoelectric coefficient
substrate clamping effect
synchrotron XRD
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