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ShanghaiTech University Knowledge Management System
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A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging
期刊论文
MICROSYSTEMS AND NANOENGINEERING, 2024, 卷号: 10, 期号: 1
作者:
Zhang, Yun
;
Jin, Tong
;
Deng, Yining
;
Zhao, Zijie
;
Wang, Rui
Adobe PDF(2637Kb)
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浏览/下载:356/4
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提交时间:2024/09/20
Blood vessels
Electromechanical actuators
Microchannels
Piezoelectric transducers
Thermography (imaging)
Tissue homeostasis
Ultrasonic imaging
Ultrasonic sensors
Ultrasonics
Fast volumetric imaging
Imaging technology
Low voltages
Micro-electro-mechanical
Micromachined ultrasound transducers
Phased array transducers
Piezoelectric
Ultrasonic phased array
Ultrasound transducer arrays
Volumetric Imaging
Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer
期刊论文
MICROMACHINES, 2024, 卷号: 15, 期号: 4
作者:
Wang, Yunhao
;
Wu, Sheng
;
Wang, Wenjing
;
Wu, Tao
;
Li, Xinxin
Adobe PDF(5053Kb)
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浏览/下载:420/52
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提交时间:2024/05/11
Aluminum nitride
Anisotropic etching
Anisotropy
Corrosion
Cost effectiveness
Diaphragms
Electrodes
Fabrication
III-V semiconductors
Natural frequencies
Piezoelectricity
Silicon wafers
Ultrasonic applications
(111) wafer
Anisotropic wet etching
Cavity structure
Micro holes
Micromachined ultrasound transducers
Piezoelectric
Piezoelectric micromachined ultrasound transducer array
The scar-free 'MIS' process
Three-fold symmetry
Ultrasound transducer arrays
Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness
期刊论文
MICROMACHINES, 2023, 卷号: 14, 期号: 3
作者:
Wu, Sheng
;
Liu, Kangfu
;
Wang, Wenjing
;
Li, Wei
;
Wu, Tao
Adobe PDF(16533Kb)
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浏览/下载:1063/258
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提交时间:2023/04/21
Aluminum nitride
Blood
Blood pressure
III-V semiconductors
Nitrides
Piezoelectricity
Stiffness
Ultrasonic applications
Ultrasonic transducers
Artery stiffness
Blood-pressure monitoring
Micromachined ultrasound transducers
Miniaturized ultrasonic device
Piezoelectric
Piezoelectric micromachined ultrasound transducer array
Pulse-echo method
Radial artery
Radial artery stiffness
Ultrasound transducer arrays
Photoacoustic and Ultrosound Dual-Modality Endoscopic Imaging Based on ALN Pmut Array
会议论文
IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES, Tokyo, Japan, January 9, 2022 - January 13, 2022
作者:
Cai, Junxiang
;
Wang, Yiyun
;
Lou, Liang
;
Zhang, Songsong
;
Gu, Yuandong
Adobe PDF(644Kb)
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浏览/下载:672/4
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提交时间:2022/04/08
Biomechanics
Endoscopy
Histology
III-V semiconductors
Light absorption
MEMS
Optical properties
Tissue
Toxic materials
Ultrasonic transducers
Aluminum nitride piezoelectric micromachined ultrasound transducer array
Dual-modality
Dual-modality endoscope
Endoscopic imaging
Micromachined ultrasound transducers
Photo-acoustic imaging
Photoacoustic signals
Piezoelectric
Ultrasound imaging
Ultrasound transducer arrays
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