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A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging
2024-12
发表期刊MICROSYSTEMS AND NANOENGINEERING (IF:7.3[JCR-2023],7.7[5-Year])
ISSN2055-7434
EISSN2055-7434
卷号10期号:1
发表状态已发表
DOI10.1038/s41378-024-00755-9
摘要

Wearable ultrasound imaging technology has become an emerging modality for the continuous monitoring of deep-tissue physiology, providing crucial health and disease information. Fast volumetric imaging that can provide a full spatiotemporal view of intrinsic 3D targets is desirable for interpreting internal organ dynamics. However, existing 1D ultrasound transducer arrays provide 2D images, making it challenging to overcome the trade-off between the temporal resolution and volumetric coverage. In addition, the high driving voltage limits their implementation in wearable settings. With the use of microelectromechanical system (MEMS) technology, we report an ultrasonic phased-array transducer, i.e., a 2D piezoelectric micromachined ultrasound transducer (pMUT) array, which is driven by a low voltage and is chip-compatible for fast 3D volumetric imaging. By grouping multiple pMUT cells into one single drive channel/element, we propose an innovative cell–element–array design and operation of a pMUT array that can be used to quantitatively characterize the key coupling effects between each pMUT cell, allowing 3D imaging with 5-V actuation. The pMUT array demonstrates fast volumetric imaging covering a range of 40 mm × 40 mm × 70 mm in wire phantom and vascular phantom experiments, achieving a high temporal frame rate of 11 kHz. The proposed solution offers a full volumetric view of deep-tissue disorders in a fast manner, paving the way for long-term wearable imaging technology for various organs in deep tissues. (Figure presented.) © The Author(s) 2024.

关键词Blood vessels Electromechanical actuators Microchannels Piezoelectric transducers Thermography (imaging) Tissue homeostasis Ultrasonic imaging Ultrasonic sensors Ultrasonics Fast volumetric imaging Imaging technology Low voltages Micro-electro-mechanical Micromachined ultrasound transducers Phased array transducers Piezoelectric Ultrasonic phased array Ultrasound transducer arrays Volumetric Imaging
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收录类别EI ; SCI
语种英语
资助项目National Key Research and Development Program of China["2023YFE0206400","2023YFB3608800"] ; National Natural Science Foundation of China["6217012870","62171442","62027901","62275264"] ; CAS-CSIRO Partnership Joint Project[172511KYSB20210008]
WOS研究方向Science & Technology - Other Topics ; Instruments & Instrumentation
WOS类目Nanoscience & Nanotechnology ; Instruments & Instrumentation
WOS记录号WOS:001310160800002
出版者Springer Nature
EI入藏号20243717035146
EI主题词Ultrasonic transducers
EI分类号101.1 ; 101.3 ; 101.8 ; 1401.4.1 ; 731.7 Mechatronix ; 746 Imaging Techniques ; 752.1 Acoustic Devices ; 753.1 Ultrasonic Waves ; 753.2 Ultrasonic Devices ; 753.3 Ultrasonic Applications
原始文献类型Journal article (JA)
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文献类型期刊论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/421438
专题信息科学与技术学院
信息科学与技术学院_PI研究组_吴涛组
信息科学与技术学院_硕士生
信息科学与技术学院_博士生
通讯作者Zhao, Zijie; Huang, Chengjun; Gao, Hang
作者单位
1.Institute of Microelectronics of the Chinese Academy of Sciences, Beijing; 100029, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China;
3.School of Biomedical Engineering, Tsinghua University, Beijing; 100084, China;
4.School of Information Science and Technology, ShanghaiTech University, Shanghai; 201210, China
推荐引用方式
GB/T 7714
Zhang, Yun,Jin, Tong,Deng, Yining,et al. A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging[J]. MICROSYSTEMS AND NANOENGINEERING,2024,10(1).
APA Zhang, Yun.,Jin, Tong.,Deng, Yining.,Zhao, Zijie.,Wang, Rui.,...&Gao, Hang.(2024).A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging.MICROSYSTEMS AND NANOENGINEERING,10(1).
MLA Zhang, Yun,et al."A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging".MICROSYSTEMS AND NANOENGINEERING 10.1(2024).
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