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Impact of Aperture on the Performance of AlN Lamb Wave Resonators on SOI substrate 会议论文
17TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2022, Virtual, Online, Taiwan, April 14, 2022 - April 17, 2022
作者:  Zhihao Li;  Yunping Niu;  Hao Ren
Adobe PDF(1641Kb)  |  收藏  |  浏览/下载：213/0  |  提交时间：2022/07/29
Influence of Electrode Duty Factor on the Performance of Lamb-Wave AlN Resonators on SOI Substrate 会议论文
17TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2022, Virtual, Online, Taiwan, April 14, 2022 - April 17, 2022
作者:  Haichao Cao;  Hao Ren
Adobe PDF(2426Kb)  |  收藏  |  浏览/下载：239/2  |  提交时间：2022/07/29
Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate 会议论文
IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES, Tokyo, Japan, January 9, 2022 - January 13, 2022
作者:  Wu, Jinbo;  Zhang, Shibin;  Zhou, Hongyan;  Zhang, Liping;  Zheng, Pengcheng
Adobe PDF(3105Kb)  |  收藏  |  浏览/下载：473/1  |  提交时间：2022/04/08
Solidly mounted longitudinally excited shear wave resonator (YBAR) based on lithium niobate thin-film 期刊论文
MICROMACHINES, 2021, 卷号: 12, 期号: 9
作者:  Qin, Zhen-Hui;  Wu, Shu-Mao;  Wang, Yong;  Liu, Kang-Fu;  Wu, Tao
Adobe PDF(3228Kb)  |  收藏  |  浏览/下载：5335/3704  |  提交时间：2021/12/03
Optimization of S1 Lamb wave resonators with A10.8Sc0.2N 会议论文
PROCEEDINGS OF THE 16TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, NEMS 2021, Xiamen, China, April 25, 2021 - April 29, 2021
作者:  Shuai Shao;  Zhifang Luo;  Tao Wu
Adobe PDF(1627Kb)  |  收藏  |  浏览/下载：326/0  |  提交时间：2021/12/03
AlN Hybrid-Coupled Resonators With High Acoustic Velocity Layer 会议论文
PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), Las Vegas, NV, SEP 07-11, 2020
作者:  Kangfu Liu;  Junrui Liang;  Tao Wu
Adobe PDF(628Kb)  |  收藏  |  浏览/下载：338/1  |  提交时间：2022/11/08
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