上海科技大学知识管理系统

This work presents a S0 mode Lamb wave resonator (LWR) leveraging niobium nitride (NbN) as a superconducting electrode material on the Al0.7Sc0.3N platform. A substantial improvement in the resonator's quality factor (Q) was observed near the superconducting transition temperature of NbN, indicating a reduction in energy dissipation within the superconducting state. Analysis based on the special modified Butterworth-Van Dyke (MBVD) model revealed that electrode loss followed the same decreasing trend as the resistance of NbN at temperatures below 10 K, with both parameters approaching zero at 4K. When operating at this low temperature, the quality factor of the resonator reaches 1524, which is approximately 7.29 times higher than room temperature. Additionally, the figure-of-merit $\left( {{\text{Fom = }}{Q^{\ast}}k_t^2} \right)$ reaches 57.89 was attained, which is approximately 5.76 times higher than room temperature. These advancements underline the promise of superconducting NbN electrodes in LWRs for next-generation hybrid quantum networks.