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ShanghaiTech University Knowledge Management System
Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film | |
2025-03 | |
发表期刊 | APPLIED PHYSICS LETTERS (IF:3.5[JCR-2023],3.5[5-Year]) |
ISSN | 0003-6951 |
EISSN | 1077-3118 |
卷号 | 126期号:9 |
发表状态 | 已发表 |
DOI | 10.1063/5.0257586 |
摘要 | This Letter introduces an innovative electrically tunable suspended acoustic waveguide utilizing aluminum scandium nitride thin film. This design allows for dynamic modulation of the phase of traveling acoustic waves through the application of a vertical electric field. With both simulation and experimental approaches, the study explores how the waveguide width and inherent dispersion properties influence phase modulation. Results indicate that broader waveguides demonstrate more significant phase lag, with phase shifts of 37.2 degrees, 40.8 degrees, and 44.7 degrees for waveguide widths of 10, 20, and 30 mu m, respectively, measured in 200 mu m-long segments under a +/- 40 V DC bias at 1.05 GHz. The exceptionally low V piL of 6.44 Vcm underscores the system's ability to control phase efficiently with minimal power consumption. The exceptional properties of the waveguide make it a promising candidate for advanced acoustic signal processing, enabling precise phase control to enhance both device performance and energy efficiency. |
关键词 | Chirp modulation Phase shift Scandium compounds Surface discharges Acoustic waveguides Acoustics waves Aluminium-scandium Dynamic modulation Electrically tunable Nitride thin films Simulation approach Thin-films Vertical electric fields Waveguide widths |
URL | 查看原文 |
收录类别 | SCI ; EI |
语种 | 英语 |
资助项目 | National Key Research and Development Program of China10.13039/501100012166[2024YFB3614104] ; National Key Research and Development Program of China[23ZR1442400] ; Shanghai Natural Science Foundation[BE2023048] ; Jiangsu Provincial Key Research and Development program[SKT2303] |
WOS研究方向 | Physics |
WOS类目 | Physics, Applied |
WOS记录号 | WOS:001439915300011 |
出版者 | AIP Publishing |
EI入藏号 | 20251118032215 |
EI主题词 | Acoustic signal processing |
EI分类号 | 701.1 Electricity: Basic Concepts and Phenomena ; 716.1 Information Theory and Signal Processing ; 751 Acoustics, Noise, Sound and Speech ; 804.2 Inorganic Compounds |
原始文献类型 | Journal article (JA) |
文献类型 | 期刊论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/503587 |
专题 | 信息科学与技术学院 信息科学与技术学院_PI研究组_吴涛组 信息科学与技术学院_硕士生 信息科学与技术学院_博士生 |
通讯作者 | Wu, Tao |
作者单位 | 1.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 4.Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 201210, Peoples R China |
第一作者单位 | 信息科学与技术学院 |
通讯作者单位 | 信息科学与技术学院 |
第一作者的第一单位 | 信息科学与技术学院 |
推荐引用方式 GB/T 7714 | Li, Jiawei,Xu, Xuankai,Li, Yang,et al. Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film[J]. APPLIED PHYSICS LETTERS,2025,126(9). |
APA | Li, Jiawei,Xu, Xuankai,Li, Yang,&Wu, Tao.(2025).Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film.APPLIED PHYSICS LETTERS,126(9). |
MLA | Li, Jiawei,et al."Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film".APPLIED PHYSICS LETTERS 126.9(2025). |
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