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Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film
2025-03
发表期刊APPLIED PHYSICS LETTERS (IF:3.5[JCR-2023],3.5[5-Year])
ISSN0003-6951
EISSN1077-3118
卷号126期号:9
发表状态已发表
DOI10.1063/5.0257586
摘要

This Letter introduces an innovative electrically tunable suspended acoustic waveguide utilizing aluminum scandium nitride thin film. This design allows for dynamic modulation of the phase of traveling acoustic waves through the application of a vertical electric field. With both simulation and experimental approaches, the study explores how the waveguide width and inherent dispersion properties influence phase modulation. Results indicate that broader waveguides demonstrate more significant phase lag, with phase shifts of 37.2 degrees, 40.8 degrees, and 44.7 degrees for waveguide widths of 10, 20, and 30 mu m, respectively, measured in 200 mu m-long segments under a +/- 40 V DC bias at 1.05 GHz. The exceptionally low V piL of 6.44 Vcm underscores the system's ability to control phase efficiently with minimal power consumption. The exceptional properties of the waveguide make it a promising candidate for advanced acoustic signal processing, enabling precise phase control to enhance both device performance and energy efficiency.

关键词Chirp modulation Phase shift Scandium compounds Surface discharges Acoustic waveguides Acoustics waves Aluminium-scandium Dynamic modulation Electrically tunable Nitride thin films Simulation approach Thin-films Vertical electric fields Waveguide widths
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收录类别SCI ; EI
语种英语
资助项目National Key Research and Development Program of China10.13039/501100012166[2024YFB3614104] ; National Key Research and Development Program of China[23ZR1442400] ; Shanghai Natural Science Foundation[BE2023048] ; Jiangsu Provincial Key Research and Development program[SKT2303]
WOS研究方向Physics
WOS类目Physics, Applied
WOS记录号WOS:001439915300011
出版者AIP Publishing
EI入藏号20251118032215
EI主题词Acoustic signal processing
EI分类号701.1 Electricity: Basic Concepts and Phenomena ; 716.1 Information Theory and Signal Processing ; 751 Acoustics, Noise, Sound and Speech ; 804.2 Inorganic Compounds
原始文献类型Journal article (JA)
文献类型期刊论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/503587
专题信息科学与技术学院
信息科学与技术学院_PI研究组_吴涛组
信息科学与技术学院_硕士生
信息科学与技术学院_博士生
通讯作者Wu, Tao
作者单位
1.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China
2.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
4.Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 201210, Peoples R China
第一作者单位信息科学与技术学院
通讯作者单位信息科学与技术学院
第一作者的第一单位信息科学与技术学院
推荐引用方式
GB/T 7714
Li, Jiawei,Xu, Xuankai,Li, Yang,et al. Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film[J]. APPLIED PHYSICS LETTERS,2025,126(9).
APA Li, Jiawei,Xu, Xuankai,Li, Yang,&Wu, Tao.(2025).Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film.APPLIED PHYSICS LETTERS,126(9).
MLA Li, Jiawei,et al."Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film".APPLIED PHYSICS LETTERS 126.9(2025).
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