Mid-infrared waveguide-integrated and photo-thermoelectric graphene photodetector based on germanium-on-silicon platform

doi:10.1063/5.0218976

	Mid-infrared waveguide-integrated and photo-thermoelectric graphene photodetector based on germanium-on-silicon platform
	Hongjun Cai; Changming Yang; Yuheng Liu; Xinliang Zhang; Yi Zou; Yu Yu
	2024-09-03
发表期刊	APL PHOTONICS (IF:5.4[JCR-2023],5.6[5-Year])
ISSN	2378-0967
EISSN	2378-0967
卷号	9 期号:9
发表状态	已发表
DOI	10.1063/5.0218976
摘要	Mid-infrared (MIR) photonic integration is desirable in the development of MIR spectroscopy and "lab-on-a-chip" sensing. The germanium-on-silicon (GOS) platform offers a promising solution for MIR photonic integration, extending the operational wavelength to a longer band by eliminating the light-absorbing buried oxide layer. However, MIR photodetectors on the GOS platform remain undeveloped due to the challenging heterogeneous integration of active materials on silicon and inadequate light absorption in the photodetection region. Here, we demonstrate a photo-thermoelectric graphene photodetector on the GOS platform, taking advantage of zero-bias operation and easy heterogeneous integration of graphene. By employing split-gate architecture and plasmonic enhancement to strengthen the light-graphene interaction, we achieve a responsivity of 1.97 V W-1 and noise equivalent power of 2.8 nW Hz(-1/2) at the wavelength of 3.7 mu m. This work enables waveguide-integrated MIR photodetection on the GOS platform for the first time, and it holds great potential for on-chip MIR sensing and imaging applications.
关键词	Germanium alloys Laser beams Photonic devices Photonic integrated circuits Photonic integration technology Silicon detectors Silicon photonics Waveguides Germanium on silicons Graphenes Heterogeneous integration Infrared waveguide Mid-infrared spectroscopy Midinfrared Photo detection Photo-thermoelectric Photonic integrations Silicon platforms
URL	查看原文
收录类别	SCI ; EI
语种	英语
资助项目	National Key Research and Development Program of Chinahttps://doi.org/10.13039/501100012166[2022YFA1404001] ; National Key Research and Development Program of China["61922034","62135004"] ; National Natural Science Foundation of China[2021BAA005] ; Key Research and Development Program of Hubei Province[OVL2021BG005]
WOS研究方向	Optics ; Physics
WOS类目	Optics ; Physics, Applied
WOS记录号	WOS:001304252200003
出版者	AIP Publishing
EI入藏号	20243617007037
EI主题词	Photodetectors
EI分类号	202.9.3 ; 714.2 Semiconductor Devices and Integrated Circuits ; 714.3 Waveguides ; 741.1/Optics ; 741.3 Optical Devices and Systems ; 744.5 Free Electron Lasers ; 942.1.12 ; 942.1.7
原始文献类型	Journal article (JA)
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/418520
专题	信息科学与技术学院_PI研究组_邹毅组信息科学与技术学院_博士生
共同第一作者	Changming Yang
通讯作者	Yi Zou; Yu Yu
推荐引用方式 GB/T 7714	Hongjun Cai,Changming Yang,Yuheng Liu,et al. Mid-infrared waveguide-integrated and photo-thermoelectric graphene photodetector based on germanium-on-silicon platform[J]. APL PHOTONICS,2024,9(9).
APA	Hongjun Cai,Changming Yang,Yuheng Liu,Xinliang Zhang,Yi Zou,&Yu Yu.(2024).Mid-infrared waveguide-integrated and photo-thermoelectric graphene photodetector based on germanium-on-silicon platform.APL PHOTONICS,9(9).
MLA	Hongjun Cai,et al."Mid-infrared waveguide-integrated and photo-thermoelectric graphene photodetector based on germanium-on-silicon platform".APL PHOTONICS 9.9(2024).