Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor

doi:10.1109/TMAG.2024.3432158

	Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor
	Wang, Yuxi; Du, Mingye; Li, Jiawei; Luo, Daozheng; Wu, Tao
	2024-09
发表期刊	IEEE TRANSACTIONS ON MAGNETICS (IF:2.1[JCR-2023],2.0[5-Year])
ISSN	0018-9464
EISSN	1941-0069
卷号	60 期号:9
发表状态	已发表
DOI	10.1109/TMAG.2024.3432158
摘要	Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers by the ΔE effect. This research investigates the angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. We outlined the fabrication steps, transducer admittance characterization, and mBVD model parameter extraction for a device resonant frequency of 378 MHz. Utilizing magneto-optic kerr effect (MOKE) microscopy, we further tracked magnetic domain reversals across 0° to 90° angles, noting significant insights into the device's easy axis at 0° and the residual magnetism and coercive fields shift in response to the external magnetic field directions. Admittance and resonance frequency shifts were analyzed across various angles, with the largest shift of approximately 90 kHz at 90° and minimal changes at 0°. The 90° angle also yielded the highest sensitivity of 25 Hz/μT. IEEE
关键词	Magnetic domains Magnetic field measurement Magnetization Magnetometers Microelectromechanical devices Natural frequencies Parameter extraction Piezoelectricity Resonators Angle-dependent Domain In-plane magnetic fields Magnetic fields measurements Magnetic fields sensors Magnetic-field Magneto-optic Kerr effect MEMS resonators Micromechanical device Piezoelectric
收录类别	EI
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20243016760553
EI主题词	Magnetic fields
EI分类号	701.1 Electricity: Basic Concepts and Phenomena ; 701.2 Magnetism: Basic Concepts and Phenomena ; 723.2 Data Processing and Image Processing ; 723.5 Computer Applications ; 922 Statistical Methods ; 942.3 Magnetic Instruments ; 942.4 Magnetic Variables Measurements
原始文献类型	Article in Press
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/407188
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
通讯作者	Wu, Tao
作者单位	School of Information Science and Technology, ShanghaiTech University, Shanghai, China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Wang, Yuxi,Du, Mingye,Li, Jiawei,et al. Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor[J]. IEEE TRANSACTIONS ON MAGNETICS,2024,60(9).
APA	Wang, Yuxi,Du, Mingye,Li, Jiawei,Luo, Daozheng,&Wu, Tao.(2024).Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor.IEEE TRANSACTIONS ON MAGNETICS,60(9).
MLA	Wang, Yuxi,et al."Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor".IEEE TRANSACTIONS ON MAGNETICS 60.9(2024).