上海科技大学知识管理系统

Miniaturized piezoelectric/magnetostrictive contour-mode resonators have been demonstrated to be effective magnetometers through the $\boldsymbol{\Delta} \mathbf{E}$ effect. A magnetic field sensor based AlN/FeGaB micro electromechanical system magnetic resonant is proposed. The angle dependence is characterized by its normalized Kerr intensity curve and resonance frequency shift. Magnetic domain reversal at 0° is related to stress distribution, which follows the region of IDT. The resonant frequency of the resonator is 378.48 MHz without external magnetic field. When the magnetic field is applied and the angle to easy axis is 0°, the resonant frequency shift is minimized and close to zero. As the magnetic field rotates, the maximum resonance frequency shift occurs when the magnetic field is at a 90° to the easy axis, reaching up to 90 kHz. Meanwhile, its magnetic field detection sensitivity is $\mathbf{25}\ \mathbf{Hz}/\boldsymbol{\mu}\mathbf{T}$.