Lithium Niobate Thin Film Resonant Infrared Detector

	Lithium Niobate Thin Film Resonant Infrared Detector
	Du, Mingye1 ; Liu, Kangfu1,2,3 ; Li, Jiawei1 ; Wang, Yuxi1,2,3 ; Liu, Yushuai1,2,3 ; Liu, Fengyu1 ; Wu, Tao1,2,3,4
	2023-06
会议录名称	2023 22ND INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, TRANSDUCERS 2023
ISSN	2167-0013
页码	1974-1977
发表状态	已发表
摘要	This paper presents the Infrared (IR) detection capabilities of a 750 nm thick Z-cut Lithium Niobate (LN) thin film resonator at the first-order antisymmetric (A1) lamb wave mode and the fundamental shear horizontal (SH0) mode. The results demonstrate that the LN resonator exhibited a 4 dB change for admittance response at A1 mode with 2.24 GHz under the illumination of an infrared light with a power of 0.575 mW, which has an approximately 13-fold improvement compared to the SH0 mode with 214.8 MHz. The design, fabrication, and IR sensing characterization of the device are described in detail. This finding indicates that LN thin film resonators have great potential for applications in infrared detection. © 2023 IEEJ.
会议录编者/会议主办者	The Institute of Electrical Engineers of Japan (IEEJ)
会议名称	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
会议地点	Kyoto, Japan
会议日期	June 25, 2023 - June 29, 2023
URL	查看原文
收录类别	EI
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20242116120440
原始文献类型	Conference article (CA)
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/381454
专题	信息科学与技术学院信息科学与技术学院_公共科研平台_机电能源与电子器件科研平台信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_博士生
通讯作者	Du, Mingye; Wu, Tao
作者单位	1.School Of Information Science And Technology, ShanghaiTech University, Shanghai; 201210, China; 2.Shanghai Institute Of Microsystem And Information Technology, Chinese Academy Of Sciences, Shanghai; 200050, China; 3.University Of Chinese Academy Of Sciences, Beijing; 100049, China; 4.Shanghai Engineering Research Center Of Energy Efficient And Custom Ai Ic, Shanghai; 201210, China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Du, Mingye,Liu, Kangfu,Li, Jiawei,et al. Lithium Niobate Thin Film Resonant Infrared Detector[C]//The Institute of Electrical Engineers of Japan (IEEJ):Institute of Electrical and Electronics Engineers Inc.,2023:1974-1977.