Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO<sub>3</sub> Thin Film

doi:10.3390/mi15040477

	Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO₃ Thin Film
	Liu, Yushuai1,2,3 ; Liu, Kangfu1,2,3 ; Li, Jiawei1,2,3 ; Li, Yang1,2,3 ; Wu, Tao1,2,3
	2024-04-01
发表期刊	MICROMACHINES (IF:3.0[JCR-2023],3.0[5-Year])
EISSN	2072-666X
卷号	15 期号:4
发表状态	已发表
DOI	10.3390/mi15040477
摘要	This article presents lithium niobate (LiNbO3) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO3 thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Qr) of 254 at the wave-propagating orientation of 0 degrees in the 36Y-cut plane.
关键词	lithium niobate (LiNbO3) resonator high electromechanical coupling coefficient shear horizontal wave
URL	查看原文
收录类别	SCI ; EI
语种	英语
资助项目	ShanghaiTech Quantum Device Lab (SQDL)[SMN180827]
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:001220333800001
出版者	MDPI
EI入藏号	20241815998048
EI主题词	Niobium compounds
EI分类号	542.4 Lithium and Alloys ; 549.1 Alkali Metals ; 631.1 Fluid Flow, General
原始文献类型	Journal article (JA)
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/378323
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
通讯作者	Wu, Tao
作者单位	1.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100864, Peoples R China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Liu, Yushuai,Liu, Kangfu,Li, Jiawei,et al. Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO₃ Thin Film[J]. MICROMACHINES,2024,15(4).
APA	Liu, Yushuai,Liu, Kangfu,Li, Jiawei,Li, Yang,&Wu, Tao.(2024).Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO₃ Thin Film.MICROMACHINES,15(4).
MLA	Liu, Yushuai,et al."Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO₃ Thin Film".MICROMACHINES 15.4(2024).