Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network
2024-03-15
发表期刊OPTICS LETTERS (IF:3.1[JCR-2023],3.1[5-Year])
ISSN0146-9592
EISSN1539-4794
卷号49期号:6页码:1485-1488
发表状态已发表
DOI10.1364/OL.511013
摘要

Circular gratings have been traditionally used as coarse alignment markers rather than fine ones for carrying out two-dimensional (2D) large-range misalignment measurements. This is primarily due to its complex phase distribution, which renders the extraction of information from high-precision alignment challenging using conventional frequency filtering methods. Along these lines, in this work, a novel, to the best of our knowledge, convolutional regression filter capable of achieving a 2D misalignment measurement with an impressive accuracy of 0.82 nm across a 3 mm range was introduced. Importantly, the proposed approach exhibited robustness against system errors and noise. It is anticipated that this strategy will provide an effective solution for similar misalignment sensing applications and hold promise for addressing future challenges in these fields. © 2024 Optica Publishing Group.

关键词Alignment Circular gratings Coarse alignments Complex phasis Extraction of information Filtering method Frequency filtering High precision alignments Phase distribution Piece-wise Two-dimensional
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收录类别EI ; SCI
语种英语
资助项目Guang'an Science and Technology Innovation Project[62104202] ; National Natural Science Foundation of China["62104202","2022CG04"] ; null[2021GYF02]
WOS研究方向Optics
WOS类目Optics
WOS记录号WOS:001224146100003
出版者Optica Publishing Group (formerly OSA)
EI入藏号20241215777203
EI主题词Information filtering
EI分类号601.1 Mechanical Devices ; 903.1 Information Sources and Analysis
原始文献类型Journal article (JA)
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文献类型期刊论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/359904
专题物质科学与技术学院
物质科学与技术学院_硕士生
通讯作者Wang, Nan
作者单位
1.School of Physical Science and Technology, Southwest Jiaotong University, Chengdu; 611756, China;
2.Department of Electronic & Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong;
3.Chengdu Rail Transit Group Co., Ltd., Chengdu; 610096, China;
4.School of Physical Science and Technology, ShanghaiTech University, Shanghai; 201210, China;
5.Zhangjiang Laboratory, Shanghai; 201210, China
推荐引用方式
GB/T 7714
Wang, Nan,Li, Yi,Jiang, Wei,et al. Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network[J]. OPTICS LETTERS,2024,49(6):1485-1488.
APA Wang, Nan,Li, Yi,Jiang, Wei,Qin, Zhen'an,&Liu, Jun.(2024).Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network.OPTICS LETTERS,49(6),1485-1488.
MLA Wang, Nan,et al."Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network".OPTICS LETTERS 49.6(2024):1485-1488.
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