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Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network | |
2024-03-15 | |
发表期刊 | OPTICS LETTERS (IF:3.1[JCR-2023],3.1[5-Year]) |
ISSN | 0146-9592 |
EISSN | 1539-4794 |
卷号 | 49期号:6页码:1485-1488 |
发表状态 | 已发表 |
DOI | 10.1364/OL.511013 |
摘要 | Circular gratings have been traditionally used as coarse alignment markers rather than fine ones for carrying out two-dimensional (2D) large-range misalignment measurements. This is primarily due to its complex phase distribution, which renders the extraction of information from high-precision alignment challenging using conventional frequency filtering methods. Along these lines, in this work, a novel, to the best of our knowledge, convolutional regression filter capable of achieving a 2D misalignment measurement with an impressive accuracy of 0.82 nm across a 3 mm range was introduced. Importantly, the proposed approach exhibited robustness against system errors and noise. It is anticipated that this strategy will provide an effective solution for similar misalignment sensing applications and hold promise for addressing future challenges in these fields. © 2024 Optica Publishing Group. |
关键词 | Alignment Circular gratings Coarse alignments Complex phasis Extraction of information Filtering method Frequency filtering High precision alignments Phase distribution Piece-wise Two-dimensional |
URL | 查看原文 |
收录类别 | EI ; SCI |
语种 | 英语 |
资助项目 | Guang'an Science and Technology Innovation Project[62104202] ; National Natural Science Foundation of China["62104202","2022CG04"] ; null[2021GYF02] |
WOS研究方向 | Optics |
WOS类目 | Optics |
WOS记录号 | WOS:001224146100003 |
出版者 | Optica Publishing Group (formerly OSA) |
EI入藏号 | 20241215777203 |
EI主题词 | Information filtering |
EI分类号 | 601.1 Mechanical Devices ; 903.1 Information Sources and Analysis |
原始文献类型 | Journal article (JA) |
引用统计 | 正在获取...
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文献类型 | 期刊论文 |
条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/359904 |
专题 | 物质科学与技术学院 物质科学与技术学院_硕士生 |
通讯作者 | Wang, Nan |
作者单位 | 1.School of Physical Science and Technology, Southwest Jiaotong University, Chengdu; 611756, China; 2.Department of Electronic & Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong; 3.Chengdu Rail Transit Group Co., Ltd., Chengdu; 610096, China; 4.School of Physical Science and Technology, ShanghaiTech University, Shanghai; 201210, China; 5.Zhangjiang Laboratory, Shanghai; 201210, China |
推荐引用方式 GB/T 7714 | Wang, Nan,Li, Yi,Jiang, Wei,et al. Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network[J]. OPTICS LETTERS,2024,49(6):1485-1488. |
APA | Wang, Nan,Li, Yi,Jiang, Wei,Qin, Zhen'an,&Liu, Jun.(2024).Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network.OPTICS LETTERS,49(6),1485-1488. |
MLA | Wang, Nan,et al."Large-range two-dimensional sub-nano-misalignment sensing for lithography with a piecewise frequency regression network".OPTICS LETTERS 49.6(2024):1485-1488. |
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