上海科技大学知识管理系统

A 5-DOF mirror chamber test system was developed to adjust offset mirror or distribution mirror for the SHINE project. Two linear guides were used for horizontal translation and rough pitch adjustments. Three vertical gearboxes were used for height, roll and yaw adjustments. In the vacuum, a fine flexure structure was engineered for the fine pitch adjustment with a piezo actuator. To prevent the cooling vibrations, the cooling module was separately fixed and the heat from the mirror was conducted by Ga/In to the cooling blade. Pitch angular vibration were measured by several equipment under different conditions. Results showed that the pitch angular vibration was below 40nrad above 1Hz without active vibration control, and below 10nrad with active vibration isolation system.