High thermal stability and optical contrast of Mo-doped Ge8Sb2Te11 films prepared by magnetron co-sputtering

doi:10.1016/j.ceramint.2023.09.341

	High thermal stability and optical contrast of Mo-doped Ge8Sb2Te11 films prepared by magnetron co-sputtering
	Yan, Zhang; Yuzhi, Zhang ; Rumeng, Song ; Jiayu, Ma ; Lingnan, Wu ; Lixin, Song
	2023-11-15
发表期刊	CERAMICS INTERNATIONAL (IF:5.1[JCR-2023],4.7[5-Year])
ISSN	0272-8842
卷号	49 期号:24 页码:40105-40111
发表状态	已发表
DOI	10.1016/j.ceramint.2023.09.341
摘要	In this work, Ge8Sb2Te11 (GST) films with high melting point element Mo doping were prepared by magnetron co-sputtering, and the influence of Mo content on the phase transformation and optical properties of the films was investigated. The results of GIXRD, XPS, and ellipsometry analysis show that Mo will occupy the lattice vacancy, promoting grain growth and accelerating phase transitions. With an increase in Mo content, the phase transition temperature of the films can reach 360 °C, and the amorphous thermal stability of the films can be enhanced by Mo doping. Meanwhile, the optical properties of the films are improved. The optical band gap of Mo-doped films is reduced, the absorption coefficient rises, and the refractive index contrast of GST films with low Mo-doping in the Vis-NIR band is as high as 2.27. This result will make it possible to apply Ge8Sb2Te11 thin films in structural color fields and broaden their color spectrum.
关键词	Ge8Sb2Te11 Mo contents Thermal properties Refractive index contrast Magnetron co-sputtering
URL	查看原文
收录类别	SCI ; EI
语种	英语
出版者	Elsevier Ltd
EI入藏号	20234014837067
EI主题词	Thin films
EI分类号	543.3 Molybdenum and Alloys ; 641.1 Thermodynamics ; 712.1 Semiconducting Materials ; 714.1 Electron Tubes ; 741.1 Light/Optics ; 933.1.2 Crystal Growth
原始文献类型	Journal article (JA)
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/345945
专题	物质科学与技术学院_硕士生
通讯作者	Yuzhi, Zhang; Lixin, Song
作者单位	1.Key Laboratory of Inorganic Coatings Materials CAS, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 200050, PR China 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, PR China 3.School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210, PR China
推荐引用方式 GB/T 7714	Yan, Zhang,Yuzhi, Zhang,Rumeng, Song,et al. High thermal stability and optical contrast of Mo-doped Ge8Sb2Te11 films prepared by magnetron co-sputtering[J]. CERAMICS INTERNATIONAL,2023,49(24):40105-40111.
APA	Yan, Zhang,Yuzhi, Zhang,Rumeng, Song,Jiayu, Ma,Lingnan, Wu,&Lixin, Song.(2023).High thermal stability and optical contrast of Mo-doped Ge8Sb2Te11 films prepared by magnetron co-sputtering.CERAMICS INTERNATIONAL,49(24),40105-40111.
MLA	Yan, Zhang,et al."High thermal stability and optical contrast of Mo-doped Ge8Sb2Te11 films prepared by magnetron co-sputtering".CERAMICS INTERNATIONAL 49.24(2023):40105-40111.