Spurious Free SAW Resonators on LiNbO3/SiO2/ Quartz Substrate for Wideband Application

doi:10.1109/EFTF/IFCS57587.2023.10272118

	Spurious Free SAW Resonators on LiNbO3/SiO2/ Quartz Substrate for Wideband Application
	Yang Chen 1; Jinbo Wu1,2 ; Xiaomeng Zhao 1; Xinjian Ke 1; Shibin Zhang 1; Pengcheng Zheng 1; Kai Huang 1; Xin Ou 1
	2023-05-15
会议录名称	2023 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFCS)
ISSN	1075-6787
发表状态	已发表
DOI	10.1109/EFTF/IFCS57587.2023.10272118
摘要	In this work, the LiNbO3/SiO2/Quartz substrate (LiNbO3-on-quartz, LNOQ) was fabricated in wafer scale using ion-cut process. 3D finite element analysis was used to design this structure. The 36°YX quartz was chosen to achieve good confinement of acoustic energy. The 42°YX LN was chosen to get large electromechanical coupling coefficient (k2) and suppress the Rayleigh mode. The 4-inch LNOQ wafer shows high film thickness uniformity of 597.8 nm ±1.8%. The fabricated shear horizontal surface acoustic wave (SH-SAW) resonator shows large k2 of 28.1% and high-quality factor of 959, thanks to the good confinement of acoustic energy and low RF loss of quartz. Besides, the resonators show clean out of band response due to the moderate acoustic velocity of quartz. © 2023 IEEE.
会议录编者/会议主办者	et al. ; Menlo Systems ; National Institute of Information and Communications Technology (NICT) ; Pendulum Instruments ; SpectraDynamics, Inc. (SDI) ; Toptica
关键词	Surface acoustic wave resonator LiNbO3-on-quartz spurious modes
会议名称	2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2023
会议地点	Toyama, Japan
会议日期	15-19 May 2023
URL	查看原文
收录类别	EI
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20234415000003
原始文献类型	Conference article (CA)
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/340946
专题	信息科学与技术学院信息科学与技术学院_博士生
作者单位	1.National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China 2.School of Information Science and Technology (SIST), ShanghaiTech University, Shanghai, People’s Republic of China
推荐引用方式 GB/T 7714	Yang Chen,Jinbo Wu,Xiaomeng Zhao,et al. Spurious Free SAW Resonators on LiNbO3/SiO2/ Quartz Substrate for Wideband Application[C]//et al., Menlo Systems, National Institute of Information and Communications Technology (NICT), Pendulum Instruments, SpectraDynamics, Inc. (SDI), Toptica:Institute of Electrical and Electronics Engineers Inc.,2023.