2.4GHz AlN Thin Film Acoustic Delay Lines

doi:10.1109/IMWS-AMP54652.2022.10106820

	2.4GHz AlN Thin Film Acoustic Delay Lines
	Jiawei Li; Mingye Du; Haorui Ni; Shuai Shao; Fenghan Lin; Tao Wu
	2022-11-27
会议录名称	2022 IEEE MTT-S INTERNATIONAL MICROWAVE WORKSHOP SERIES ON ADVANCED MATERIALS AND PROCESSES FOR RF AND THZ APPLICATIONS (IMWS-AMP)
ISSN	2766-9564
发表状态	已发表
DOI	10.1109/IMWS-AMP54652.2022.10106820
摘要	This work presents the design and analysis of 2.4 GHz acoustic delay lines (ADLs) based on AlN thin film. Thickness-field-excited single-phase unidirectional transducer (TFE-SPUDT) design is implemented for acoustic waves to travel more efficiently. The structure parameters including wavelength, aperture and cell number of the devices are analyzed and optimized by finite element analysis (FEA) to satisfy specific frequency band and low insertion loss. Besides, different gap lengths are also simulated to extract the group delay and phase velocity. The results show a minimum insertion loss (IL) of 1.043 dB and a 3-dB bandwidth (BW) of 133.1 MHz at the center frequency of approximately 2.414 GHz. For fundamental symmetric (S0) lamb waves, the phase velocity is extracted as approximately 10313 m/s. With the feature of CMOS-compatible, the high frequency ADLs based on AlN thin film are potential candidates for RF microsystem to fulfill signal processing.
关键词	Aluminum nitride (AlN) acoustic delay lines (ADLs) lamb wave unidirectional transducers
会议地点	Guangzhou, China
会议日期	2022-11-27
URL	查看原文
收录类别	EI
来源库	IEEE
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/301114
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_本科生信息科学与技术学院_博士生信息科学与技术学院_PI研究组_林丰涵组
作者单位	School of Information Science and Technology, ShanghaiTech University, Shanghai, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Jiawei Li,Mingye Du,Haorui Ni,et al. 2.4GHz AlN Thin Film Acoustic Delay Lines[C],2022.