Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness

doi:10.3390/mi14030539

	Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness
	Wu, Sheng1,2,3 ; Liu, Kangfu1,2,3 ; Wang, Wenjing 4; Li, Wei 1,3; Wu, Tao1,2,3 ; Yang, Heng 1,3; Li, Xinxin1,2,3
	2023-03
发表期刊	MICROMACHINES (IF:3.0[JCR-2023],3.0[5-Year])
EISSN	2072-666X
卷号	14 期号:3
DOI	10.3390/mi14030539
摘要	An aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array was proposed and fabricated for non-invasive radial artery stiffness monitoring, which could be employed in human vascular health monitoring applications. Using surface micromachining techniques, four hexagonal PMUT arrays were fabricated within a chip area of 3 × 3 mm2. The mechanical displacement sensitivity and quality factor of a single PMUT were tested and found to be 24.47 nm/V at 5.94 MHz and 278 (in air), respectively. Underwater pulse-echo tests for the array demonstrated a −3 dB bandwidth of 0.76 MHz at 3.75 MHz and distance detection limit of approximately 25 mm. Using the PMUT array as an ultrasonic probe, the depth and diameter changes over cardiac cycles of the radial artery were measured to be approximately 3.8 mm and 0.23 mm, respectively. Combined with blood pressure calibration, the biomechanical parameters of the radial artery vessel were extracted using a one-dimensional vascular model. The cross-sectional distensibility, compliance, and stiffness index were determined to be 4.03 × 10−3/mmHg, 1.87 × 10−2 mm2/mmHg, and 5.25, respectively, consistent with the newest medical research. The continuous beat-to-beat blood pressure was also estimated using this model. This work demonstrated the potential of miniaturized PMUT devices for human vascular medical ultrasound applications. © 2023 by the authors.
关键词	Aluminum nitride Blood Blood pressure III-V semiconductors Nitrides Piezoelectricity Stiffness Ultrasonic applications Ultrasonic transducers Artery stiffness Blood-pressure monitoring Micromachined ultrasound transducers Miniaturized ultrasonic device Piezoelectric Piezoelectric micromachined ultrasound transducer array Pulse-echo method Radial artery Radial artery stiffness Ultrasound transducer arrays
URL	查看原文
收录类别	EI
语种	英语
出版者	MDPI
EI入藏号	20231513869847
EI主题词	Nanocomposites
EI分类号	461.2 Biological Materials and Tissue Engineering ; 461.9 Biology ; 701.1 Electricity: Basic Concepts and Phenomena ; 712.1 Semiconducting Materials ; 753.2 Ultrasonic Devices ; 753.3 Ultrasonic Applications ; 761 Nanotechnology ; 804.1 Organic Compounds ; 804.2 Inorganic Compounds ; 933 Solid State Physics ; 951 Materials Science
原始文献类型	Journal article (JA)
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/292227
专题	信息科学与技术学院信息科学与技术学院_特聘教授组_李昕欣组信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_博士生
通讯作者	Wu, Tao; Yang, Heng; Li, Xinxin
作者单位	1.State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai; 200050, China; 2.School of Information Science and Technology, ShanghaiTech University, Shanghai; 201210, China; 3.School of Microelectronics, University of Chinese Academy of Sciences, Beijing; 100049, China; 4.East China Institute of Photo-Electron IC, Bengbu; 233030, China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Wu, Sheng,Liu, Kangfu,Wang, Wenjing,et al. Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness[J]. MICROMACHINES,2023,14(3).
APA	Wu, Sheng.,Liu, Kangfu.,Wang, Wenjing.,Li, Wei.,Wu, Tao.,...&Li, Xinxin.(2023).Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness.MICROMACHINES,14(3).
MLA	Wu, Sheng,et al."Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness".MICROMACHINES 14.3(2023).