Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

doi:10.1088/1361-6439/aaeafe

	Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function
	Ke, Wenjian1,2,3 ; Wang, Yi 1; Zhou, Hong 1; Li, Tie 1; Wang, Yuelin1
	2018-12
发表期刊	JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IF:2.4[JCR-2023],2.0[5-Year])
ISSN	0960-1317
卷号	28 期号:12
发表状态	已发表
DOI	10.1088/1361-6439/aaeafe
摘要	This paper presents the design, fabrication and characterization of a CMOS-compatible thermopile infrared (IR) detector with self-test function based on XeF2 front-side dry etching. In order to achieve better performance, a heavily doped N/P-polysilicon is utilized to form thermocouples, and XeF(2 )front-side isotropic etching is adopted to release and thermal isolation. At the same time, a platinum heater on the absorption layer is designed to serve as a heat source to realize the self-test function of the thermopile IR detector. IR radiation sensing shows that the detector achieves relatively high responsivity of 160.03 V W-1 and detectivity of 9.75 x 10(7) cm . Hz(1/2) and a extremely short response time of 2.5 ms in air at room temperature. In addition, a self-test measurement is conducted and validated by applying a voltage to the heater. Compared with traditional methods for detecting thermopile performance, this method has obvious convenience and simplicity, which provides an effective way for performance monitoring of thermal-based devices.
关键词	self-test thermopile infrared detector heater high-performance
收录类别	EI ; SCIE ; SCI
语种	英语
资助项目	Project for Shanghai Outstanding Academic Leaders[15XD1504300]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000450253500006
出版者	IOP PUBLISHING LTD
EI入藏号	20184806131636
EI主题词	CMOS integrated circuits ; Fabrication ; Fluorine compounds ; Infrared detectors ; Integrated circuit design ; Thermocouples
EI分类号	Semiconductor Devices and Integrated Circuits:714.2 ; Temperature Measuring Instruments:944.5 ; Radiation Measuring Instruments:944.7
WOS关键词	FOCAL-PLANE ARRAY ; SENSORS
原始文献类型	Article
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/28725
专题	信息科学与技术学院_博士生信息科学与技术学院_特聘教授组_王跃林组
通讯作者	Wang, Yuelin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai, Peoples R China 2.Univ ShanghaiTech, Sch Informat Sci & Technol, Shanghai, Peoples R China 3.Univ Chinese Acad Sci, Beijing, Peoples R China
第一作者单位	上海科技大学
推荐引用方式 GB/T 7714	Ke, Wenjian,Wang, Yi,Zhou, Hong,et al. Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,28(12).
APA	Ke, Wenjian,Wang, Yi,Zhou, Hong,Li, Tie,&Wang, Yuelin.(2018).Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,28(12).
MLA	Ke, Wenjian,et al."Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 28.12(2018).