LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional Actuation

doi:10.1109/MEMS49605.2023.10052626

	LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional Actuation
	Yaoqing Lu; Kangfu Liu; Yuxi Wang; Ran Nie; Tao Wu
	2023-01
会议录名称	INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC.
ISSN	1084-6999
卷号	2023-January
页码	669-672
发表状态	已发表
DOI	10.1109/MEMS49605.2023.10052626
摘要	In this work, the dual-axis resonant micro-mirrors based on the 128°Y-cut lithium niobate on insulator (LNOI) have been experimentally demonstrated for the first time. We pioneered the utilization of the anisotropy of lithium niobate materials to simplify the control of micro-mirrors. Two pairs of e16 torsional actuators are used to drive torsion mode and rocking mode, respectively. High electro-mechanical coupling factor K216 in two orthogonal in-plane directions is required to achieve dual-axis actuation. The frequencies of the torsion mode and rocking mode are up to 60.034 kHz and 205.347 kHz, respectively. The corresponding optical angles of torsion mode and rocking mode are 13.04° and 9.16° in the air when the drive voltage is 10 VPP. Our work provides a novel solution for dual-axis piezoelectric MEMS micro-mirrors, which is promising for application in miniaturized optical systems.
会议录编者/会议主办者	IEEE MEMS Technical Community
关键词	Dual-axis LNOI Micro-mirror Torsional actuation
会议名称	36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
会议地点	deu,Munich
会议日期	2023-01-15
学科门类	Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Mechanical Engineering ; Electrical and Electronic Engineering
URL	查看原文
收录类别	EI ; SCOPUS
语种	英语
出版者	Institute of Electrical and Electronics Engineers Inc.
EI入藏号	20231113731577
EI主题词	Torsional stress
EI分类号	542.4 Lithium and Alloys ; 549.1 Alkali Metals ; 704.2 Electric Equipment ; 741.3 Optical Devices and Systems
原始文献类型	Conference Paper
Scopus 记录号	2-s2.0-85149896377
来源库	SCOPUS
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286548
专题	信息科学与技术学院信息科学与技术学院_PI研究组_吴涛组信息科学与技术学院_硕士生信息科学与技术学院_博士生
作者单位	School of Information Science and Technology, ShanghaiTech University, Shanghai, China
第一作者单位	信息科学与技术学院
第一作者的第一单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Yaoqing Lu,Kangfu Liu,Yuxi Wang,et al. LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional Actuation[C]//IEEE MEMS Technical Community:Institute of Electrical and Electronics Engineers Inc.,2023:669-672.