ShanghaiTech University Knowledge Management System
| Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate | |
| 2023-01 | |
| 会议录名称 | INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC. |
| ISSN | 1084-6999 |
| 卷号 | 2023-January |
| 页码 | 177-180 |
| 发表状态 | 已发表 |
| DOI | 10.1109/MEMS49605.2023.10052357 |
| 摘要 | This work demonstrates a first-order antisymmetric Lamb wave (A1) mode MEMS filter with a fractional bandwidth (FBW) exceeding 24%. Based on the localized thinned 128° Y-cut lithium niobate (LiNbO3) films, the series and shunt A1 mode resonators exhibit excellent effective electromechanical coupling coefficients (keff2) of 43.6% and 39.8%, respectively, which is the key to realizing ultra-wideband RF acoustic filters. The fabricated A1 mode filter with a center frequency of 1.79 GHz achieves a minimum insertion loss of 0.61 dB and a maximum 3-dB FBW of 24.6%. After further optimizations, the A1 mode filters will have great potential as broadband acoustic-only filters for 5G New Radio bands. |
| 会议录编者/会议主办者 | IEEE MEMS Technical Community |
| 关键词 | 5G New Radio A1 mode acoustic filters lithium niobate MEMS resonators ultra-wideband |
| 会议名称 | 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 |
| 会议地点 | deu,Munich |
| 会议日期 | 2023-01-15 |
| 学科门类 | Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Mechanical Engineering ; Electrical and Electronic Engineering |
| URL | 查看原文 |
| 收录类别 | EI ; SCOPUS |
| 语种 | 英语 |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| EI入藏号 | 20231113731841 |
| EI主题词 | Bandwidth |
| EI分类号 | 542.4 Lithium and Alloys ; 549.1 Alkali Metals ; 704.2 Electric Equipment ; 716.1 Information Theory and Signal Processing ; 716.3 Radio Systems and Equipment ; 752.1 Acoustic Devices |
| 原始文献类型 | Conference Paper |
| Scopus 记录号 | 2-s2.0-85149885257 |
| 来源库 | SCOPUS |
| 引用统计 | 正在获取...
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| 文献类型 | 会议论文 |
| 条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286546 |
| 专题 | 信息科学与技术学院_博士生 信息科学与技术学院_PI研究组_吴涛组 |
| 通讯作者 | Zhang, Shibin; Wu, Tao; Ou, Xin |
| 作者单位 | 1.Shanghai Institute of Microsystem and Information Technology,The State Key Laboratory of Functional Materials for Informatics,Shanghai,200050,China; 2.University of Chinese Academy of Sciences,The Center of Materials Science and Optoelectronics Engineering,Beijing,100049,China; 3.Shanghai Tech University,Shanghai,201210,China |
| 第一作者单位 | 上海科技大学 |
| 通讯作者单位 | 上海科技大学 |
| 推荐引用方式 GB/T 7714 | Wu, Jinbo,Zhang, Shibin,Zheng, Pengcheng,et al. Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate[C]//IEEE MEMS Technical Community:Institute of Electrical and Electronics Engineers Inc.,2023:177-180. |
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