Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate
2023-01
会议录名称INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC.
ISSN1084-6999
卷号2023-January
页码177-180
发表状态已发表
DOI10.1109/MEMS49605.2023.10052357
摘要

This work demonstrates a first-order antisymmetric Lamb wave (A1) mode MEMS filter with a fractional bandwidth (FBW) exceeding 24%. Based on the localized thinned 128° Y-cut lithium niobate (LiNbO3) films, the series and shunt A1 mode resonators exhibit excellent effective electromechanical coupling coefficients (keff2) of 43.6% and 39.8%, respectively, which is the key to realizing ultra-wideband RF acoustic filters. The fabricated A1 mode filter with a center frequency of 1.79 GHz achieves a minimum insertion loss of 0.61 dB and a maximum 3-dB FBW of 24.6%. After further optimizations, the A1 mode filters will have great potential as broadband acoustic-only filters for 5G New Radio bands.

会议录编者/会议主办者IEEE MEMS Technical Community
关键词5G New Radio A1 mode acoustic filters lithium niobate MEMS resonators ultra-wideband
会议名称36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
会议地点deu,Munich
会议日期2023-01-15
学科门类Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Mechanical Engineering ; Electrical and Electronic Engineering
URL查看原文
收录类别EI ; SCOPUS
语种英语
出版者Institute of Electrical and Electronics Engineers Inc.
EI入藏号20231113731841
EI主题词Bandwidth
EI分类号542.4 Lithium and Alloys ; 549.1 Alkali Metals ; 704.2 Electric Equipment ; 716.1 Information Theory and Signal Processing ; 716.3 Radio Systems and Equipment ; 752.1 Acoustic Devices
原始文献类型Conference Paper
Scopus 记录号2-s2.0-85149885257
来源库SCOPUS
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文献类型会议论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286546
专题信息科学与技术学院_博士生
信息科学与技术学院_PI研究组_吴涛组
通讯作者Zhang, Shibin; Wu, Tao; Ou, Xin
作者单位
1.Shanghai Institute of Microsystem and Information Technology,The State Key Laboratory of Functional Materials for Informatics,Shanghai,200050,China;
2.University of Chinese Academy of Sciences,The Center of Materials Science and Optoelectronics Engineering,Beijing,100049,China;
3.Shanghai Tech University,Shanghai,201210,China
第一作者单位上海科技大学
通讯作者单位上海科技大学
推荐引用方式
GB/T 7714
Wu, Jinbo,Zhang, Shibin,Zheng, Pengcheng,et al. Ultra-Wideband Mems Filters Using Localized Thinned 128° Y-Cut Thin-Film Lithium Niobate[C]//IEEE MEMS Technical Community:Institute of Electrical and Electronics Engineers Inc.,2023:177-180.
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