ShanghaiTech University Knowledge Management System
| Microwave-Induced Thermoacoustic Imaging Using Aluminum Nitride PMUT | |
| 2023-01 | |
| 会议录名称 | INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC. |
| ISSN | 1084-6999 |
| 卷号 | 2023-January |
| 页码 | 413-416 |
| 发表状态 | 已发表 |
| DOI | 10.1109/MEMS49605.2023.10052158 |
| 摘要 | This paper reports the novel application of an aluminum nitride (AlN) multi-cell piezoelectric micromachined ultrasonic transducer (PMUT) device in microwave-induced thermoacoustic imaging (MITAI). PMUT is used as the ultrasonic transducer (UT) in thermoacoustic imaging for the first time. This proposed PMUT device has an improved frequency response due to the design of cells with cavities in variant diameters. The device was characterized and tested in a microwave-induced thermoacoustic reconstruction process. The utilization of PMUT device was proved to achieve significantly higher quality images from reconstruction. The results from the proposed PMUT showed a decrease of 53% in mean square error (MSE) and increased the structural similarity (SSIM) by 19.7 times. This will potentially enable smaller yet better medical MITAI equipment. |
| 会议录编者/会议主办者 | IEEE MEMS Technical Community |
| 关键词 | Aluminum nitride PMUT thermoacoustic imaging |
| 会议名称 | 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 |
| 出版地 | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| 会议地点 | deu,Munich |
| 会议日期 | 2023-01-15 |
| 学科门类 | Electronic, Optical and Magnetic Materials ; Condensed Matter Physics ; Mechanical Engineering ; Electrical and Electronic Engineering |
| URL | 查看原文 |
| 收录类别 | EI ; CPCI-S ; SCOPUS |
| 语种 | 英语 |
| 资助项目 | National Natural Science Foundation of China[61874073] ; Lingang Laboratory[LG-QS-202202-05] |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics |
| WOS类目 | Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology |
| WOS记录号 | WOS:000975359200110 |
| 出版者 | IEEE |
| EI入藏号 | 20231113731873 |
| EI主题词 | Aluminum nitride |
| EI分类号 | 704.2 Electric Equipment ; 712.1 Semiconducting Materials ; 753.2 Ultrasonic Devices ; 804.1 Organic Compounds ; 804.2 Inorganic Compounds ; 922.2 Mathematical Statistics |
| 原始文献类型 | Conference Paper |
| Scopus 记录号 | 2-s2.0-85149852517 |
| 来源库 | SCOPUS |
| 引用统计 | 正在获取...
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| 文献类型 | 会议论文 |
| 条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/286542 |
| 专题 | 信息科学与技术学院 信息科学与技术学院_PI研究组_王雄组 信息科学与技术学院_PI研究组_吴涛组 信息科学与技术学院_硕士生 信息科学与技术学院_博士生 |
| 通讯作者 | Wang, Yiwei; Zhang, Lejia; Wang, Xiong; Wu, Tao |
| 作者单位 | 1.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China 3.Univ Chinese Acad Sci, Beijing, Peoples R China 4.Shanghai Engn Res Ctr Energy Efficient & Custom A, Shanghai, Peoples R China 5.Shanghai Ind & Technol Res Inst, Shanghai, Peoples R China |
| 第一作者单位 | 信息科学与技术学院 |
| 通讯作者单位 | 信息科学与技术学院 |
| 第一作者的第一单位 | 信息科学与技术学院 |
| 推荐引用方式 GB/T 7714 | Wang, Yiwei,Zhang, Lejia,Cai, Junxiang,et al. Microwave-Induced Thermoacoustic Imaging Using Aluminum Nitride PMUT[C]//IEEE MEMS Technical Community. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:413-416. |
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