上海科技大学知识管理系统

The optical constants refractive index and extinction coefficient accuracy of thin films directly affects the properties of designed and fabricated optical devices. Most of the determination methods of optical constants are complex and cannot be applied during the film depositing process. In this paperan optical constants determination method of thin films on-site is proposed. By monitoring the transmittance of depositing materialsthis method can rapidly and accurately determine the optical constants on-site. For demonstrationthe near-infrared optical constants of high-absorption material Silow-absorption material Ta2O5 and ultra-low-absorption material SiO2 are obtained as n=3.22k=4.6×10-3n=2.06k=1. 3×10-3 and n= 1.46k=6. 6×10-5 respectively by this method. It reveals that this method is suitable for determining both strong and weak absorption materials’ optical constants. It provides an effective way for precisely determining optical constants on-sitewhich is meaningful for the design and fabrication of high-quality optical devices. © 2022 Chinese Optical Society. All rights reserved.