Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

doi:10.1038/srep08072

	Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
	Lin, Jintian 1,3; Xu, Yingxin 2; Fang, Zhiwei1,4 ; Wang, Min 1,3; Song, Jiangxin 1,3; Wang, Nengwen 1; Qiao, Lingling 1; Fang, Wei 2; Cheng, Ya1
	2015-01-28
发表期刊	SCIENTIFIC REPORTS
ISSN	2045-2322
卷号	5
发表状态	已发表
DOI	10.1038/srep08072
摘要	We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter similar to 82 mu m) LN resonator possesses a Q factor of similar to 2.5 X 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
收录类别	SCI
语种	英语
资助项目	NSFC[61275205] ; NSFC[11104245] ; NSFC[61108015] ; NSFC[61008011] ; NSFC[11174305] ; NSFC[11104294] ; NSFC[61205209]
WOS研究方向	Science & Technology - Other Topics
WOS类目	Multidisciplinary Sciences
WOS记录号	WOS:000348435800007
出版者	NATURE PUBLISHING GROUP
WOS关键词	GENERATION ; MICROCAVITY ; RESONATORS ; SURFACE
原始文献类型	Article
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/2266
专题	物质科学与技术学院物质科学与技术学院_特聘教授组_程亚组物质科学与技术学院_博士生
通讯作者	Fang, Wei
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Zhejiang Univ, Dept Opt Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 4.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China
推荐引用方式 GB/T 7714	Lin, Jintian,Xu, Yingxin,Fang, Zhiwei,et al. Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining[J]. SCIENTIFIC REPORTS,2015,5.
APA	Lin, Jintian.,Xu, Yingxin.,Fang, Zhiwei.,Wang, Min.,Song, Jiangxin.,...&Cheng, Ya.(2015).Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.SCIENTIFIC REPORTS,5.
MLA	Lin, Jintian,et al."Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining".SCIENTIFIC REPORTS 5(2015).