On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

doi:10.1080/15599612.2015.1034905

	On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater
	Tang, Jialei 1,2; Lin, Jintian 1; Song, Jiangxin 1,2; Fang, Zhiwei1,3 ; Wang, Min 1,2; Liao, Yang 1; Qiao, Lingling 1; Cheng, Ya1
	2015-04-03
发表期刊	INTERNATIONAL JOURNAL OF OPTOMECHATRONICS
ISSN	1559-9612
卷号	9 期号:2 页码:187-194
发表状态	已发表
DOI	10.1080/15599612.2015.1034905
摘要	We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 mu m away from the microresonator, has a footprint size of 200 mu mx400 mu m. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.
关键词	microfabrication integrated optics microresonator
收录类别	SCI ; EI
语种	英语
WOS研究方向	Engineering ; Optics
WOS类目	Engineering, Electrical & Electronic ; Engineering, Mechanical ; Optics
WOS记录号	WOS:000354877500006
出版者	TAYLOR & FRANCIS INC
EI入藏号	20152000847333
EI主题词	Integrated optics ; Microelectromechanical devices ; Microfabrication ; Resonators
WOS关键词	WHISPERING-GALLERY-MODE ; FEMTOSECOND LASER ; LABEL-FREE ; MICROCAVITIES ; MICROSPHERES ; FABRICATION ; FIBER
原始文献类型	Article
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/2228
专题	物质科学与技术学院物质科学与技术学院_特聘教授组_程亚组物质科学与技术学院_博士生
通讯作者	Cheng, Ya
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Shanghai 201800, Peoples R China 3.Shanghai Tech Univ, Sch Phys Sci & Technol, Shanghai, Peoples R China
推荐引用方式 GB/T 7714	Tang, Jialei,Lin, Jintian,Song, Jiangxin,et al. On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater[J]. INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,2015,9(2):187-194.
APA	Tang, Jialei.,Lin, Jintian.,Song, Jiangxin.,Fang, Zhiwei.,Wang, Min.,...&Cheng, Ya.(2015).On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater.INTERNATIONAL JOURNAL OF OPTOMECHATRONICS,9(2),187-194.
MLA	Tang, Jialei,et al."On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater".INTERNATIONAL JOURNAL OF OPTOMECHATRONICS 9.2(2015):187-194.