Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing
Peng, Xin1,2,3; Lv, Yanqing1,4; Xu, Pengcheng1; Li, Xinxin1,2; Yu, Haitao1; Xu, Jiaqiang4
2018
Source PublicationSENSORS AND MATERIALS
ISSN0914-4935
Volume30Issue:4Pages:757-766
Status已发表
DOI10.18494/SAM.2018.1798
AbstractGas sensors based on resonant microcantilevers have drawn significant attention in the application of trace molecule detection. In order to realize the practical application of microcantilever-based sensors, three critical points still must be addressed: inexpensive and batch-fabricated microcantilevers, high-performance sensing material and easily operated signal-processing circuit with intelligent software. Herein, a gas sensing system with a multiand- interdisciplinary collaboration mode is proposed. A low-cost and IC-foundry-compatible fabrication technology of the resonant microcantilever is developed. For the example of trace aniline detection, a scalable metal-organic-framework (MOF) material of MOF-5 with ultrahigh surface area and abundant specific aniline-adsorption sites is prepared. For sensing signal processing, an interface circuit with intelligent data processing capability is designed. Composed of the low-cost microcantilever, the advanced MOF-5 sensing material, and the intelligent signal process, the new gas sensing system shows satisfactory performance for trace aniline vapor detection.
KeywordMEMS gas sensor microcantilever MOF-5 PLL
Indexed BySCI ; EI
Language英语
Funding ProjectYouth Innovation Promotion Association CAS[2017278] ; Youth Innovation Promotion Association CAS[2016213]
WOS Research AreaInstruments & Instrumentation ; Materials Science
WOS SubjectInstruments & Instrumentation ; Materials Science, Multidisciplinary
WOS IDWOS:000435403300007
PublisherMYU, SCIENTIFIC PUBLISHING DIVISION
EI Accession Number20181805121384
EI KeywordsAniline ; Application programs ; Chemical detection ; Chemical sensors ; Composite micromechanics ; Crystalline materials ; Data handling ; Foundries ; Gas detectors ; Integrated circuits ; MEMS ; Organometallics ; Phase locked loops ; Timing circuits ; Trace elements
EI Classification NumberFoundries:534.1 ; Electric Equipment:704.2 ; Pulse Circuits:713.4 ; Electronic Circuits Other Than Amplifiers, Oscillators, Modulators, Limiters, Discriminators or Mixers:713.5 ; Semiconductor Devices and Integrated Circuits:714.2 ; Information Theory and Signal Processing:716.1 ; Computer Software, Data Handling and Applications:723 ; Data Processing and Image Processing:723.2 ; Chemistry:801 ; Organic Compounds:804.1 ; Accidents and Accident Prevention:914.1 ; Mechanics:931.1 ; Crystalline Solids:933.1
WOS KeywordMETAL-ORGANIC FRAMEWORKS ; PHASE-LOCKED LOOP ; CRYSTALLINE-SILICON ; SENSORS ; VAPOR ; MOF-5
Original Document TypeArticle
Citation statistics
Cited Times [WOS]:0   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttps://kms.shanghaitech.edu.cn/handle/2MSLDSTB/20912
Collection信息科学与技术学院
信息科学与技术学院_特聘教授组_李昕欣组
信息科学与技术学院_硕士生
Corresponding AuthorLi, Xinxin
Affiliation1.State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai; 200050, China
2.School of Information Science and Technology, Shanghai Tech University, 393 Middle Huaxia Road, Shanghai; 201210, China
3.University of Chinese Academy of Sciences, No. 19(A) Yuquan Road, Beijing; 100049, China
4.Department of Chemistry, College of Science, Shanghai University, 99 Shangda Road, Shanghai; 200444, China
First Author AffilicationSchool of Information Science and Technology
Corresponding Author AffilicationSchool of Information Science and Technology
Recommended Citation
GB/T 7714
Peng, Xin,Lv, Yanqing,Xu, Pengcheng,et al. Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing[J]. SENSORS AND MATERIALS,2018,30(4):757-766.
APA Peng, Xin,Lv, Yanqing,Xu, Pengcheng,Li, Xinxin,Yu, Haitao,&Xu, Jiaqiang.(2018).Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing.SENSORS AND MATERIALS,30(4),757-766.
MLA Peng, Xin,et al."Gas Sensing System Composed of IC-foundry-compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing".SENSORS AND MATERIALS 30.4(2018):757-766.
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