RF Characteristics of Two Generations of RFeSI HR-SOI Substrates Over Temperature
2018-05-01
发表期刊IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS
ISSN1558-1764
卷号28期号:5
DOI10.1109/LMWC.2018.2813884
摘要RF losses and nonlinearities of the commercially available Soitec radio frequency enhanced signal integrity (RFeSI) high-resistivity silicon-on-insulator substrates are investigated through investigation of 50- $\Omega $ coplanar waveguide lines manufactured on them. It is shown that the losses of the RFeSI substrates are very small. They have a temperature minimum value at around 70 °C. The generated second- and third-harmonic powers, due to the nonlinearities of the substrates, also have a similar temperature minimum value. The results indicate that the RFeSI substrates present a good RF performance over a temperature range from 0 °C to 115 °C. The RF performance of the two generations of RFeSI substrates is also compared. The losses of the two RFeSI substrates remain the same over the explored temperature range, whereas the harmonic performance of generation 2 (RFeSI 90) is better than that of generation 1 (RFeSI 80). This stems from the increased effective resistivity.
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收录类别SCI ; SCIE ; EI
来源库IEEE
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文献类型期刊论文
条目标识符https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/20845
专题物质科学与技术学院
物质科学与技术学院_博士生
作者单位
1.State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
2.School of Physical Science and Technology, China School of Physical Science and Technology, and School of Physical Science and Technology, ShanghaiTech University, Shanghai, China
3.University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
4.Soitec Company, Bernin, France
5.Department of Research and Development, Shanghai Industrial μTechnology Research Institute, Shanghai, China
6.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
第一作者单位物质科学与技术学院
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Lei Zhu,Shuangke Liu,Frederic Allibert,et al. RF Characteristics of Two Generations of RFeSI HR-SOI Substrates Over Temperature[J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS,2018,28(5).
APA Lei Zhu.,Shuangke Liu.,Frederic Allibert.,Ionut Radu.,Xinen Zhu.,...&Xi Wang.(2018).RF Characteristics of Two Generations of RFeSI HR-SOI Substrates Over Temperature.IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS,28(5).
MLA Lei Zhu,et al."RF Characteristics of Two Generations of RFeSI HR-SOI Substrates Over Temperature".IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS 28.5(2018).
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