Compositional study of δ-NbN film by Auger electron microscopy

doi:10.1007/s42864-022-00143-8

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	Compositional study of δ-NbN film by Auger electron microscopy
	Chen, Zhao-Xi1 ; Dong, Peng2,3 ; Zhang, Yi-Wen2,3 ; Jiang, Yi-Lan2 ; Ding, Yi-Fan2,3 ; Wu, Yue-Shen2 ; Wang, Jing-Hui2,3 ; Zhou, Xiang2,3 ; Li, Jun2,3,4,5
	2023-03
发表期刊	TUNGSTEN (IF:5.6[JCR-2023],5.5[5-Year])
ISSN	2661-8028
EISSN	2661-8036
卷号	5 期号:1 页码:130-135
发表状态	已发表
DOI	10.1007/s42864-022-00143-8
摘要	The chemical stoichiometry on the surface of superconducting δ-NbN thin films is of great importance for their application. Here, we fabricated the δ-NbN thin films on SiO2/Si substrate by DC sputtering method. The film was characterized using X-ray diffraction (XRD) and atomic force microscopy (AFM). Transport properties were measured to reveal the field dependent superconducting transition temperature. Both XRD and electrical measurement show high crystallinity of δ-NbN phase. A homogeneous and smooth surface morphology was measured by AFM. Auger electron spectroscopy (AES) was applied to analyze the composition along the depth of the film. The evolution of Auger peak profile, heights and nitride stoichiometry at the film surface is discussed. The current study provides a more thorough understanding of complex chemical compositions of δ-NbN thin films. © 2022, The Nonferrous Metals Society of China.
关键词	Augers Crystallinity Morphology Niobium compounds Silica Stoichiometry Superconducting films Superconducting transition temperature Surface morphology Thin films X ray diffraction Atomic-force-microscopy Auger electron microscopy Auger-electron spectroscopy Chemical stoichiometry Compositional studies Depth-profile Magnetron-sputtering NbN thin film Si substrates Surface oxidations
收录类别	EI ; SCOPUS ; ESCI
语种	英语
出版者	Springer
EI入藏号	20222112150456
EI主题词	Auger electron spectroscopy
EI分类号	502.2 Mine and Quarry Equipment ; 701.1 Electricity: Basic Concepts and Phenomena ; 708.3 Superconducting Materials ; 801.4 Physical Chemistry ; 931.2 Physical Properties of Gases, Liquids and Solids ; 933.1 Crystalline Solids ; 951 Materials Science
原始文献类型	Article in Press
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/187912
专题	大科学中心物质科学与技术学院_公共科研平台_物质科学电镜平台物质科学与技术学院_硕士生物质科学与技术学院_博士生物质科学与技术学院_PI研究组_李军组物质科学与技术学院_公共科研平台_拓扑物理实验室大科学中心_公共科研平台_变革性技术研发部
通讯作者	Chen, Zhao-Xi
作者单位	1.Center for Transformative Science, ShanghaiTech University, Shanghai; 201210, China; 2.School of Physical Science and Technology, ShanghaiTech University, Shanghai; 201210, China; 3.ShanghaiTech Laboratory for Topological Physics, ShanghaiTech University, Shanghai; 200031, China; 4.State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai; 200050, China; 5.Wuhan National High Magnetic Field Center, Huazhong University of Science & Technology, Wuhan; 430074, China
第一作者单位	上海科技大学
通讯作者单位	上海科技大学
第一作者的第一单位	上海科技大学
推荐引用方式 GB/T 7714	Chen, Zhao-Xi,Dong, Peng,Zhang, Yi-Wen,et al. Compositional study of δ-NbN film by Auger electron microscopy[J]. TUNGSTEN,2023,5(1):130-135.
APA	Chen, Zhao-Xi.,Dong, Peng.,Zhang, Yi-Wen.,Jiang, Yi-Lan.,Ding, Yi-Fan.,...&Li, Jun.(2023).Compositional study of δ-NbN film by Auger electron microscopy.TUNGSTEN,5(1),130-135.
MLA	Chen, Zhao-Xi,et al."Compositional study of δ-NbN film by Auger electron microscopy".TUNGSTEN 5.1(2023):130-135.