Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology

doi:10.3389/fphy.2022.864985

	Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology
	Tian, Naxi 1; Jiang, Hui 1,2,3; Xue, Lian 1; Xie, Jianan1,4
	2022-04-07
发表期刊	FRONTIERS IN PHYSICS (IF:1.9[JCR-2023],2.5[5-Year])
ISSN	2296-424X
卷号	10
发表状态	已发表
DOI	10.3389/fphy.2022.864985
摘要	Speckle scanning metrology is an effective tool to determine the X-ray wave front error in synchrotron radiation. By measuring wave front radii of curvature, X-ray optics can be high-precision aligned and adaptive optics can be used for compensating these wave front errors to pursue an aberration-free wave front. Photon beam and motor vibrations are the major limitations in characterizing the beam performances. An analytical model is presented in this article to reveal the influences of photon beams and motor vibrations on the measurements of the wave front radii of curvature. It is worth noting that the influence of low-frequency vibration is oscillatory and thus the selection of sampling frequency is strongly related. The experimental results verify the model and reveal the main dependency of the experimental deviations on the amplitude and frequency of vibrations.
关键词	speckle scanning metrology synchrotron radiation vibration analysis vibration frequency wave front radius of curvature
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收录类别	SCI ; SCIE ; EI
语种	英语
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
WOS记录号	WOS:000791406300001
出版者	FRONTIERS MEDIA SA
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/180899
专题	物质科学与技术学院_硕士生
通讯作者	Jiang, Hui
作者单位	1.Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai Synchrotron Radiat Facil, Shanghai, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai, Peoples R China 3.Univ Chinese Acad Sci, Beijing, Peoples R China 4.ShanghaiTech Univ, Sch Phys Sci & Technl, Shanghai, Peoples R China
推荐引用方式 GB/T 7714	Tian, Naxi,Jiang, Hui,Xue, Lian,et al. Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology[J]. FRONTIERS IN PHYSICS,2022,10.
APA	Tian, Naxi,Jiang, Hui,Xue, Lian,&Xie, Jianan.(2022).Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology.FRONTIERS IN PHYSICS,10.
MLA	Tian, Naxi,et al."Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology".FRONTIERS IN PHYSICS 10(2022).