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ShanghaiTech University Knowledge Management System
| Wafer-Level Fabricated Double-Helix Rf-Mems Transformers with Coupling-Factor of 0.93@100Mhz for High-Efficiency Isolated Power/Signal Transmission | |
| 2022 | |
| 会议录名称 | IEEE SYMPOSIUM ON MASS STORAGE SYSTEMS AND TECHNOLOGIES |
| ISSN | 2160-1968 |
| 卷号 | 2022-January |
| 页码 | 200-203 |
| 发表状态 | 已发表 |
| DOI | 10.1109/MEMS51670.2022.9699782 |
| 摘要 | This paper presents silicon-chip-based 3D embedded double-helix RF transformers (EDHTs) that are wafer-level micromachined using the rapid molten-alloy MEMS-casting technique. With tightly coupled metal double-helix structure and ZnAl-alloy MEMS-casting process in silicon wafers, one EDHT with the tiny footprint of 1mm*2mm can be fabricated in batches. Isolation is achieved by the silicon dioxide layer formed by thermal oxidation between the coils. The EDHT is showing low enough DC resistance (0.8O) and 121.4nH inductance value which is several times higher inductance integration density than those planar spiral devices and measured to exhibit ultra-high coupling-factor (>0.90) and maximum transformer efficiency (>81%) in the wide frequency range of 30MHz200MHz, being proved to significantly improve the efficiency and the integration-density in isolated power/signal transmission applications. © 2022 IEEE. |
| 会议录编者/会议主办者 | IEEE ; IEEE MEMS Technical Community |
| 关键词 | Efficiency Fabrication Inductance Silica Silicon wafers Double helix Isolation technology MEMS-casting Microtransformers Power signals Power/signal transmission RF transformers RF-MEMS Signal transmission Wafer level |
| 会议名称 | 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 |
| 出版地 | 345 E 47TH ST, NEW YORK, NY 10017 USA |
| 会议地点 | Tokyo, Japan |
| 会议日期 | January 9, 2022 - January 13, 2022 |
| URL | 查看原文 |
| 收录类别 | EI ; CPCI-S |
| 语种 | 英语 |
| 资助项目 | National Key Research and Development Program of the Ministry of Science and Technology of China[2016YFA0200803] ; Innovation Team and Talents Cultivation Program of National Administration of Traditional Chinese Medicine[ |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics |
| WOS类目 | Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology |
| WOS记录号 | WOS:000784358100051 |
| 出版者 | IEEE Computer Society |
| EI入藏号 | 20221211806957 |
| EI主题词 | Thermooxidation |
| EI分类号 | 701.1 Electricity: Basic Concepts and Phenomena ; 714.2 Semiconductor Devices and Integrated Circuits ; 802.2 Chemical Reactions ; 913.1 Production Engineering |
| 原始文献类型 | Conference article (CA) |
| 来源库 | IEEE |
| 文献类型 | 会议论文 |
| 条目标识符 | https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/167144 |
| 专题 | 信息科学与技术学院_博士生 信息科学与技术学院_特聘教授组_李昕欣组 |
| 通讯作者 | Li, Xinxin |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China |
| 通讯作者单位 | 信息科学与技术学院 |
| 推荐引用方式 GB/T 7714 | Chen, Changnan,Wang, Nianying,Gu, Jiebin,et al. Wafer-Level Fabricated Double-Helix Rf-Mems Transformers with Coupling-Factor of 0.93@100Mhz for High-Efficiency Isolated Power/Signal Transmission[C]//IEEE, IEEE MEMS Technical Community. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE Computer Society,2022:200-203. |
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