Low voltage field emission of single Cu nanowire in air with nanoscale gaps for vacuum electronics

doi:10.1049/mnl.2017.0411

	Low voltage field emission of single Cu nanowire in air with nanoscale gaps for vacuum electronics
	Liu, Meng1,2,3 ; Yang, Yang 1,2; Li, Tie 1,2; Wang, Yuelin1,2,3
	2017-11
发表期刊	MICRO & NANO LETTERS (IF:1.5[JCR-2023],1.1[5-Year])
ISSN	1750-0443
卷号	12 期号:11 页码:897-900
发表状态	已发表
DOI	10.1049/mnl.2017.0411
摘要	Field emission applications to date including displays have featured electrode gaps in the micron scale or even larger. Devices such as vacuum field effect transistors demand smaller gaps for improved performance and continued scaling. The present work investigates nanoscale cathode-anode distances and evaluated field emission characteristics using a single Cu emitter. The gap was systematically varied between 20 and 80 nm with the aid of focused ion beam etching. Field emission was achieved at bias voltages below 5 V under atmospheric conditions with a 20 nm gap between the cathode and anode. The turn-on voltage was 1.75 V and the maximum current reached 32.5 nA at 5 V. The emission current is dependent on the cathode-anode distance and decreases exponentially with increasing distance. The nanoscale gap allows lower drive voltages than in previous studies while providing large emission currents for a single emitter.
关键词	field emission cathodes nanowires copper focused ion beam technology sputter etching low voltage field emission single Cu nanowire nanoscale gaps vacuum electronics nanoscale cathode-anode distances single Cu emitter focused ion beam etching bias voltages turn-on voltage emission current Cu
收录类别	SCI ; CPCI ; EI
语种	英语
资助项目	National Natural Science Foundation of China[61327811]
WOS研究方向	Science & Technology - Other Topics ; Materials Science
WOS类目	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
WOS记录号	WOS:000414615000015
出版者	INST ENGINEERING TECHNOLOGY-IET
EI入藏号	20174604395048
EI主题词	Anodes ; Cathodes ; Electrodes ; Field effect transistors ; Field emission ; Field emission cathodes ; Ion beams ; Nanotechnology ; Vacuum technology
EI分类号	Vacuum Technology:633 ; Electron Tubes:714.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Nanotechnology:761 ; High Energy Physics:932.1
WOS关键词	INDIVIDUAL CARBON NANOTUBES ; FABRICATION
原始文献类型	Article ; Proceedings Paper
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/14256
专题	信息科学与技术学院_特聘教授组_王跃林组信息科学与技术学院_博士生
通讯作者	Wang, Yuelin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Lab Microsyst, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China 3.Univ ShanghaiTech, Sch Informat Sci & Technol, Shanghai 200120, Peoples R China
第一作者单位	上海科技大学
通讯作者单位	上海科技大学
推荐引用方式 GB/T 7714	Liu, Meng,Yang, Yang,Li, Tie,et al. Low voltage field emission of single Cu nanowire in air with nanoscale gaps for vacuum electronics[J]. MICRO & NANO LETTERS,2017,12(11):897-900.
APA	Liu, Meng,Yang, Yang,Li, Tie,&Wang, Yuelin.(2017).Low voltage field emission of single Cu nanowire in air with nanoscale gaps for vacuum electronics.MICRO & NANO LETTERS,12(11),897-900.
MLA	Liu, Meng,et al."Low voltage field emission of single Cu nanowire in air with nanoscale gaps for vacuum electronics".MICRO & NANO LETTERS 12.11(2017):897-900.