一种水平结构布局的脉冲激光沉积系统

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	一种水平结构布局的脉冲激光沉积系统
翻译题名	Pulse laser deposition system with horizontal structure layout
申请号	CN202110745685.2
	2021-07-01
公开（公告）号	CN113463035A
公开日期	2021-10-01
摘要	本申请提供一种水平结构布局的脉冲激光沉积系统，包括：真空腔体，包括一或多个靶材及可活动载样部件；传样腔体，与所述真空腔体连通；传样杆，其包括抓取部件；所述抓取部件抓取样品后穿过所述传样腔体后进入所述真空腔体，供所述可活动载样部件活动至与所述抓取部件对准的位置后装载所述样品。本发明的水平结构布局设计，有效避免小颗粒的回落，从而提高了薄膜生长的质量；靶材的立方体布局设计，有效避免交叉污染；所有传动结构都可密封在不锈钢保护罩内，有效避免小颗粒在齿轮间的沉积；在不破坏主腔体真空的条件下，通过更换传样杆前端的抓取头便可同时实现传样操作和更换靶材操作，操作简单，有效提高工作效率；系统稳定性提高且易于维护。
翻译摘要	The pulse laser deposition system comprises a vacuum cavity body, and comprises one or a plurality of target materials and a movable sample carrying component. The sample transmission cavity is communicated with the vacuum cavity body. The sample transmission rod comprises a grabbing part. The grabbing part enters the vacuum cavity after capturing the sample and then enters the vacuum cavity for loading the sample after the movable sample loading part is moved to a position aligned with the grabbing part. By means of the horizontal structural layout design, falling of small particles is effectively avoided, and therefore the film growth quality is improved. The cubic layout design of the target material can effectively avoid cross contamination. All the transmission structures can be sealed in the stainless steel protective cover, so that deposition of small particles among gears is effectively avoided. Under the condition that the vacuum of the main cavity is not damaged, the sample transferring operation and the target replacing operation can be realized at the same time by replacing the grabbing head at the front end of the sample transferring rod, the operation is simple, and the working efficiency is effectively improved. System stability improves and easily maintains.
当前权利人	上海科技大学
专利代理人	倪静
代理机构	上海光华专利事务所(普通合伙) 31219
专利申请人	上海科技大学
	孟建伟; 刘鹏; 翁祖谦
公开国别	中国
公开国别简称	CN
IPC 分类号	C23C14//28; C23C14//56
专利有效性	失效
专利类型	发明申请
专利类型字典	1
当前法律状态	驳回
简单同族	CN113463035A
扩展同族	CN113463035A
INPADOC 同族	CN113463035A
文献类型	专利
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/128275
专题	大科学中心物质科学与技术学院硬x射线自由电子激光装置项目大科学中心_公共科研平台_大科学装置建设部
作者单位	上海科技大学
推荐引用方式 GB/T 7714	孟建伟, 刘鹏, 翁祖谦. 一种水平结构布局的脉冲激光沉积系统. CN202110745685.2[P]. 2021-07-01.