一种水平结构布局的脉冲激光沉积系统
Alternative TitlePulse laser deposition system with horizontal structure layout
Application NumberCN202110745685.2
2021-07-01
Open (Notice) NumberCN113463035A
Date Available2021-10-01
Abstract本申请提供一种水平结构布局的脉冲激光沉积系统,包括:真空腔体,包括一或多个靶材及可活动载样部件;传样腔体,与所述真空腔体连通;传样杆,其包括抓取部件;所述抓取部件抓取样品后穿过所述传样腔体后进入所述真空腔体,供所述可活动载样部件活动至与所述抓取部件对准的位置后装载所述样品。本发明的水平结构布局设计,有效避免小颗粒的回落,从而提高了薄膜生长的质量;靶材的立方体布局设计,有效避免交叉污染;所有传动结构都可密封在不锈钢保护罩内,有效避免小颗粒在齿轮间的沉积;在不破坏主腔体真空的条件下,通过更换传样杆前端的抓取头便可同时实现传样操作和更换靶材操作,操作简单,有效提高工作效率;系统稳定性提高且易于维护。
Other AbstractThe pulse laser deposition system comprises a vacuum cavity body, and comprises one or a plurality of target materials and a movable sample carrying component. The sample transmission cavity is communicated with the vacuum cavity body. The sample transmission rod comprises a grabbing part. The grabbing part enters the vacuum cavity after capturing the sample and then enters the vacuum cavity for loading the sample after the movable sample loading part is moved to a position aligned with the grabbing part. By means of the horizontal structural layout design, falling of small particles is effectively avoided, and therefore the film growth quality is improved. The cubic layout design of the target material can effectively avoid cross contamination. All the transmission structures can be sealed in the stainless steel protective cover, so that deposition of small particles among gears is effectively avoided. Under the condition that the vacuum of the main cavity is not damaged, the sample transferring operation and the target replacing operation can be realized at the same time by replacing the grabbing head at the front end of the sample transferring rod, the operation is simple, and the working efficiency is effectively improved. System stability improves and easily maintains.
Rights Holder上海科技大学
Patent Agent倪静
Agency上海光华专利事务所(普通合伙) 31219
Patent Applicant上海科技大学
孟建伟; 刘鹏; 翁祖谦
Country中国
Public national abbreviationCN
IPC Classification NumberC23C14//28; C23C14//56
Patent Status审中
Subtype发明申请
Patent type dictionary1
Status实质审查
Simple kinCN113463035A
Extended kinCN113463035A
INPADOC kinCN113463035A
Document Type专利
Identifierhttps://kms.shanghaitech.edu.cn/handle/2MSLDSTB/128275
Collection大科学中心
Affiliation上海科技大学
Recommended Citation
GB/T 7714
孟建伟, 刘鹏, 翁祖谦. 一种水平结构布局的脉冲激光沉积系统. CN202110745685.2[P]. 2021-07-01.
Files in This Item:
File Name/Size DocType Version Access License
一种水平结构布局的脉冲激光沉积系统.pd(487KB)专利 暂不开放CC BY-NC-SAView Application Full Text
Related Services
Usage statistics
Scholar Google
Similar articles in Scholar Google
[孟建伟]'s Articles
[ 刘鹏]'s Articles
[ 翁祖谦]'s Articles
Baidu academic
Similar articles in Baidu academic
[孟建伟]'s Articles
[ 刘鹏]'s Articles
[ 翁祖谦]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[孟建伟]'s Articles
[ 刘鹏]'s Articles
[ 翁祖谦]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 一种水平结构布局的脉冲激光沉积系统.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.