Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvesters

doi:10.1109/EDTM50988.2021.9420990

	Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvesters
	Wang, Nianying1,2,3 ; Han, Ruofeng 1,3; Chen, Changnan 1,3; Gu, Jiebin 1,3; Li, Xinxin1,2,3
	2021
会议录名称	2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)
发表状态	已发表
DOI	10.1109/EDTM50988.2021.9420990
摘要	This paper reports a silicon-based electromagnetic (EM) kinetic energy harvester which is fabricated with MEMS and wafer-level micro-casting techniques to form the on-chip integrated 3D double-deck metal solenoids and magnet-sliding channel The EM kinetic energy harvester collects ambient energy high-efficiently with frequency-range of 16-40Hz and the maximum power generation is 41.6uW. Moreover, the energy harvester is triggered under 2.5g ambient vibration with more than 20uW average power output, which has prospect to power electronic micro-systems.
会议录编者/会议主办者	IEEE
关键词	Electromagnetic kinetic energy harvester micro-casting technique 3D double-deck metal solenoids
会议名称	5th IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
会议地点	Chengdu, PEOPLES R CHINA
会议日期	APR 08-11, 2021
收录类别	CPCI-S ; EI ; CPCI
WOS记录号	WOS:000675595800169
出版者	IEEE
原始文献类型	Proceedings Paper
引用统计	正在获取...
文献类型	会议论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/127948
专题	信息科学与技术学院_博士生信息科学与技术学院_特聘教授组_李昕欣组
通讯作者	Li, Xinxin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China; 2.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China; 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Wang, Nianying,Han, Ruofeng,Chen, Changnan,et al. Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvesters[C]//IEEE:IEEE,2021.