Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester

doi:10.3390/mi12010074

	Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester
	Wang, Nianying1,2,3 ; Han, Ruofeng 1,3; Chen, Changnan 1,3; Gu, Jiebin 1,3; Li, Xinxin1,2,3
	2021-01
发表期刊	MICROMACHINES
EISSN	2072-666X
卷号	12 期号:1 页码:#VALUE!
DOI	10.3390/mi12010074
摘要	A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (<100 Hz) vibrational energy into electricity with high efficiency. With wafer-level micro electro mechanical systems (MEMS) fabrication to form a metal casting mold and the following casting technique to rapidly (within minutes) fill molten ZnAl alloy into the pre-micromachined silicon mold, the 300-turn solenoid coils (150 turns for either inner solenoid or outer solenoid) are fabricated in silicon wafers for saw dicing into chips. A cylindrical permanent magnet is inserted into a pre-etched channel for sliding upon external vibration, which is surrounded by the solenoids. The size of the harvester chip is as small as 10.58 mm x 2.06 mm x 2.55 mm. The internal resistance of the solenoids is about 17.9 omega. The maximum peak-to-peak voltage and average power output are measured as 120.4 mV and 43.7 mu W. The EM energy harvester shows great improvement in power density, which is 786 mu W/cm(3) and the normalized power density is 98.3 mu W/cm(3)/g. The EM energy harvester is verified by experiment to be able to generate electricity through various human body movements of walking, running and jumping. The wafer-level fabricated chip-style solenoidal EM harvesters are advantageous in uniform performance, small size and volume applications.
关键词	kinetic energy harvester electromagnetic electricity generation double-deck 3D metal solenoids MEMS technology micro-casting technology wafer-level fabrication Aluminum alloys Binary alloys Energy harvesting Foundries Kinetic energy Kinetics MEMS Metal casting Metal castings Molds Permanent magnets Solenoids Zinc alloys Generate electricity Human body movement Internal resistance Micro electromechanical system (MEMS) Micromachined silicon Peak to peak voltages Threedimensional (3 d) Vibrational energies
URL	查看原文
收录类别	SCI ; SCIE ; EI
语种	英语
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000610514900001
出版者	MDPI
EI入藏号	20210609900583
EI主题词	Silicon wafers
EI分类号	525.5 Energy Conversion Issues ; 534.1 Foundries ; 534.2 Foundry Practice ; 541.2 Aluminum Alloys ; 546.3 Zinc and Alloys ; 704.1 Electric Components ; 704.2 Electric Equipment ; 714.2 Semiconductor Devices and Integrated Circuits ; 931 Classical Physics ; Quantum Theory ; Relativity
原始文献类型	Article
引用统计
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/125935
专题	信息科学与技术学院_硕士生信息科学与技术学院_特聘教授组_李昕欣组信息科学与技术学院_博士生
通讯作者	Li, Xinxin
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China; 2.ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China; 3.Chinese Acad Sci, Beijing 100049, Peoples R China
第一作者单位	信息科学与技术学院
通讯作者单位	信息科学与技术学院
推荐引用方式 GB/T 7714	Wang, Nianying,Han, Ruofeng,Chen, Changnan,et al. Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester[J]. MICROMACHINES,2021,12(1):#VALUE!.
APA	Wang, Nianying,Han, Ruofeng,Chen, Changnan,Gu, Jiebin,&Li, Xinxin.(2021).Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester.MICROMACHINES,12(1),#VALUE!.
MLA	Wang, Nianying,et al."Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester".MICROMACHINES 12.1(2021):#VALUE!.