HgCdTe mid-Infrared photo response enhanced by monolithically integrated meta-lenses

doi:10.1038/s41598-020-62433-w

	HgCdTe mid-Infrared photo response enhanced by monolithically integrated meta-lenses
	Li, Fangzhe1,2,3 ; Deng, Jie 1,2; Zhou, Jing 1; Chu, Zeshi 1,2; Yu, Yu3 ; Dai, Xu 1,2; Guo, Huijun 4; Chen, Lu 4; Guo, Shangkun 1,2; Lan, Mengke 1; Chen, Xiaoshuang1,3
	2020-04-14
发表期刊	SCIENTIFIC REPORTS (IF:3.8[JCR-2023],4.3[5-Year])
ISSN	2045-2322
卷号	10 期号:1
发表状态	已发表
DOI	10.1038/s41598-020-62433-w
摘要	Polarization-independent dielectric meta-lens is proposed to monolithically integrate with a HgCdTe infrared photodetector to concentrate power flux into a reduced photosensitive area for performance enhancement. Although a reduction in photosensitive area could suppress the dark current, the more seriously reduced light absorptance would degrade the specific detectivity D-. The integration of the meta-lens could reverse the situation by improving the absorptance of the photosensitive region. The meta-lens composed of an array of nano-pillars with varying diameters is formed by carving the CdZnTe substrate of the HgCdTe detector so that the integration could be accomplished in situ. The meta-lens focuses the incident light through the CdZnTe medium and at the HgCdTe photosensitive region. The focal spot is about the wavelength size and the focusing efficiency is above 63%. Concerning a HgCdTe detector with a pitch size of 40 mu mx40 mu m, when the photosensitive area is reduced to 5 mu mx5 mu m, the meta-lens could still keep the light absorptance above 50%, which is 49 times higher than that of the device without the meta-lens. The dark current reduces with the decreasing photosensitive area in a linear manner. When the photosensitive area shrinks from 40 mu mx40 mu m to 10 mu mx10 mu m or 5 mu mx5 mu m, the dark current reduces by 16 or even 64 times. Compared to the pristine device, the employment of the meta-lens together with the reduction in photosensitive area could enhance D- by 5.5 times for the photosensitive area as 5 mu mx5 mu m. Further, the meta-lens exhibits a good dispersion tolerance over the wavelength range from 3.3 mu m to 5 mu m. The averaged detectivity enhancement over this spectrum range is around 3 times for the photosensitive area as 5 mu mx5 mu m. The angular response of the meta-lens integrated detector depends on the focal length. For a focal length of 73 mu m or 38 mu m, the angle of view for a 5 mu mx5 mu m photosensitive area is 4.0 degrees or 7.7 degrees. For the inter-pillar distance to be 2 mu m in our design, the influence of the coupling effect between the nano-pillars on the performance of the meta-lens is little.
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收录类别	SCI ; SCIE
语种	英语
资助项目	National Key Research and Development Program of China[2018YFA0306200] ; National Natural Science Foundation of China[U1737111][61975223][91850208][61991442][61521005][61874126][61805267] ; Fund of Shanghai Science and Technology Foundation[18ZR1446000][18JC1420401][18ZR1445400]
WOS研究方向	Science & Technology - Other Topics
WOS类目	Multidisciplinary Sciences
WOS记录号	WOS:000562162800050
出版者	NATURE PUBLISHING GROUP
WOS关键词	FOCAL-PLANE ARRAYS ; REFRACTIVE-INDEX ; HIGH-EFFICIENCY ; MICROLENS ARRAYS ; FLAT LENSES ; BROAD-BAND ; DESIGN ; PERFORMANCE ; WAVELENGTHS ; FABRICATION
原始文献类型	Article
引用统计	正在获取...
文献类型	期刊论文
条目标识符	https://kms.shanghaitech.edu.cn/handle/2MSLDSTB/123085
专题	物质科学与技术学院_硕士生物质科学与技术学院_特聘教授组_陈效双组物质科学与技术学院_博士生
通讯作者	Zhou, Jing; Chen, Xiaoshuang
作者单位	1.Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, Shanghai 200083, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China 4.Chinese Acad Sci, Shanghai Inst Tech Phys, Key Lab Infrared Imagining Mat & Detectors, Shanghai 200083, Peoples R China
第一作者单位	物质科学与技术学院
通讯作者单位	物质科学与技术学院
推荐引用方式 GB/T 7714	Li, Fangzhe,Deng, Jie,Zhou, Jing,et al. HgCdTe mid-Infrared photo response enhanced by monolithically integrated meta-lenses[J]. SCIENTIFIC REPORTS,2020,10(1).
APA	Li, Fangzhe.,Deng, Jie.,Zhou, Jing.,Chu, Zeshi.,Yu, Yu.,...&Chen, Xiaoshuang.(2020).HgCdTe mid-Infrared photo response enhanced by monolithically integrated meta-lenses.SCIENTIFIC REPORTS,10(1).
MLA	Li, Fangzhe,et al."HgCdTe mid-Infrared photo response enhanced by monolithically integrated meta-lenses".SCIENTIFIC REPORTS 10.1(2020).